From zguo at stanford.edu  Fri Apr 22 01:00:59 2011
From: zguo at stanford.edu (Zhiqiang Guo)
Date: Fri, 22 Apr 2011 01:00:59 -0700 (PDT)
Subject: Need help for increasing Si etch rate
Message-ID: <1822293787.152016.1303459259526.JavaMail.root@zm01.stanford.edu>

Hi, Xactix users:

I was trying to use 30s 3torr recipe to release my feature from Silicon wafer, however, I could not get a good rate (Etched 200 cycles, about 100 min, but got only 10um undercut at the most). Could anyone share your experience to get a high undercut etch rate (as reported 1um/min)?

Thanks a lot,
Zhiqiang


From edmyers at stanford.edu  Fri Apr 22 07:49:13 2011
From: edmyers at stanford.edu (Ed Myers)
Date: Fri, 22 Apr 2011 07:49:13 -0700
Subject: Need help for increasing Si etch rate
In-Reply-To: <1822293787.152016.1303459259526.JavaMail.root@zm01.stanfor
 d.edu>
References: <1822293787.152016.1303459259526.JavaMail.root@zm01.stanford.edu>
Message-ID: <6.2.5.6.2.20110422074828.02a37940@stanford.edu>

Zhiqiang,

Etch rate is highly dependent on exposed Si.  Sounds like you have 
too much exposed silicon.  Can we set a time where I can look at your sample.

Ed


At 01:00 AM 4/22/2011, Zhiqiang Guo wrote:
>Hi, Xactix users:
>
>I was trying to use 30s 3torr recipe to release my feature from 
>Silicon wafer, however, I could not get a good rate (Etched 200 
>cycles, about 100 min, but got only 10um undercut at the most). 
>Could anyone share your experience to get a high undercut etch rate 
>(as reported 1um/min)?
>
>Thanks a lot,
>Zhiqiang