From balaji at snf.stanford.edu  Fri Apr 12 10:52:11 2002
From: balaji at snf.stanford.edu (balaji at snf.stanford.edu)
Date: Apr 12, 2002 10:52:11 AM
Subject: Problem yes 2002-04-12 10:52:10: no priming
Message-ID: <mailman.0.1356284096.5434.yes-pcs@snf.stanford.edu>

Upon pushing the 'start' button, the program keeps looping between steps 2 and 3 and never goes past step 3.



From balaji at snf.stanford.edu  Fri Apr 12 11:07:16 2002
From: balaji at snf.stanford.edu (balaji at snf.stanford.edu)
Date: Apr 12, 2002 11:07:16 AM
Subject: Shutdown yes 2002-04-12 11:07:15: no priming
Message-ID: <mailman.1.1356284096.5434.yes-pcs@snf.stanford.edu>

Program keeps looping between steps 2 and 3 and does not go beyond steps. Pressure needs to be 10mTorr at step3, but actual pressure reads 100mTorr. Cause not identified.



From martinez at snf.stanford.edu  Fri Apr 12 02:36:03 2002
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Apr 12, 2002 2:36:03 PM
Subject: Shutdown yes 2002-04-12 11:07:15: no priming
Message-ID: <mailman.2.1356284096.5434.yes-pcs@snf.stanford.edu>

checked & corrected program. test cycle good



From martinez at snf.stanford.edu  Fri Apr 12 02:36:20 2002
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Apr 12, 2002 2:36:20 PM
Subject: Problem yes 2002-04-12 10:52:10: no priming
Message-ID: <mailman.3.1356284096.5434.yes-pcs@snf.stanford.edu>

prob cleared



From balaji at snf.stanford.edu  Mon Apr 15 03:01:26 2002
From: balaji at snf.stanford.edu (balaji at snf.stanford.edu)
Date: Apr 15, 2002 3:01:26 PM
Subject: Problem yes 2002-04-15 15:01:24: contaminated
Message-ID: <mailman.4.1356284096.5434.yes-pcs@snf.stanford.edu>

YES oven appears contaminated. After priming, my wafers had particles sticking all over the wafer. Also the chamber looks like it has powdery material littered all over the interior. Needs thorough cleaning.



From vilanova at snf.stanford.edu  Tue Apr 16 07:41:08 2002
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Apr 16, 2002 7:41:08 AM
Subject: Problem yes 2002-04-15 15:01:24: contaminated
Message-ID: <mailman.5.1356284096.5434.yes-pcs@snf.stanford.edu>

cleaned



From martinez at snf.stanford.edu  Tue Apr 30 01:56:30 2002
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Apr 30, 2002 1:56:30 PM
Subject: Shutdown yes 2002-04-19 15:41:11: contamination
Message-ID: <mailman.6.1356284096.5434.yes-pcs@snf.stanford.edu>

cleaned chamber, replaced door seal. ready for use