Problem yes 2002-04-15 15:01:24: contaminated

balaji at snf.stanford.edu balaji at snf.stanford.edu
Mon Apr 15 03:01:26 PDT 2002


YES oven appears contaminated. After priming, my wafers had particles sticking all over the wafer. Also the chamber looks like it has powdery material littered all over the interior. Needs thorough cleaning.




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