From lindaw at snf.stanford.edu Thu Feb 5 06:49:02 2004 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Thu, 5 Feb 2004 06:49:02 -0800 Subject: Comment yes 2004-02-05 06:49:02: Bad adhesion again Message-ID: spinning 3612 on polysilicon. Primed my wafers in oven, observed bubbling in cannister during prime. Seems ok, but after spin on track #2, resist pulling back away from the edges of the wafers, a lot. From lindaw at snf.stanford.edu Thu Feb 5 06:56:09 2004 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Thu, 5 Feb 2004 06:56:09 -0800 Subject: Comment yes 2004-02-05 06:56:08: bad adhesion due to overpriming??? Message-ID: Could it be that now that we are really seeing the canister bubble away during prime (as opposed to before when it didn't) that we could be overpriming? Just a thought. I will try using singe and track prime after sulfuric strip to see if resist adhesion any better. From lindaw at snf.stanford.edu Thu Feb 5 08:54:12 2004 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Thu, 5 Feb 2004 08:54:12 -0800 Subject: Comment yes 2004-02-05 08:54:11: bad adhesion update Message-ID: I went with a regular singe and track2 vapor prime and coat, and the adhesion looks good after hot plate bake. No pulling away from the wafer edge at all. Summary: Wafers out of furnace, sit overnight, Vapor prime =bad adhesion Sulfuric strip and vapor prime =bad adhesion sulfuric strip and singe, prime on track = visually better adhesion. From emyers at snf.stanford.edu Fri Feb 20 11:16:00 2004 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 20 Feb 2004 11:16:00 -0800 Subject: Problem yes 2004-02-20 11:15:59: Message-ID: Door Leaking duriing Vac . cylce. Not able to pump down ovenduring process. From martinez at snf.stanford.edu Fri Feb 20 14:49:20 2004 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Fri, 20 Feb 2004 14:49:20 -0800 Subject: Problem yes 2004-02-20 11:15:59: Message-ID: ran test cycled, system pumps to 800 mtorr for vp step. most likely user DID NOT properly latch door.