Comment yes 2004-02-05 06:49:02: Bad adhesion again

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Thu Feb 5 06:49:02 PST 2004


spinning 3612 on polysilicon.  Primed my wafers in oven, observed bubbling in cannister during prime. Seems ok, but after spin on track #2, resist pulling back away from the edges of the wafers, a lot.




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