From daneman at snf.stanford.edu Fri Jan 9 11:45:59 2004 From: daneman at snf.stanford.edu (daneman at snf.stanford.edu) Date: Fri, 9 Jan 2004 11:45:59 -0800 Subject: Problem yes 2004-01-09 11:45:58: Bad coating Message-ID: Wafers coated on svgcoat(1 or 2) after the YES oven prime have splotches (uncovered areas) around the edges of the wafer. Adding an svgcoat prime in addtion to the YES made the resist coating uniform. From vilanova at snf.stanford.edu Fri Jan 9 14:10:55 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 9 Jan 2004 14:10:55 -0800 Subject: Problem yes 2004-01-09 11:45:58: Bad coating Message-ID: checked and tested , ok to use. please make sure you close the oven door properly. From mahnaz at snf.stanford.edu Thu Jan 15 10:34:22 2004 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 15 Jan 2004 10:34:22 -0800 Subject: Problem yes 2004-01-15 10:34:21: not dispensing HMDS Message-ID: the system goes under vaccume but hmds bubbles are not showing. Mike is already working on the system. From mahnaz at snf.stanford.edu Thu Jan 15 10:35:01 2004 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 15 Jan 2004 10:35:01 -0800 Subject: Shutdown yes 2004-01-15 10:35:01: HMDS not functioning Message-ID: From mahnaz at snf.stanford.edu Tue Jan 27 11:55:38 2004 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 27 Jan 2004 11:55:38 -0800 Subject: Shutdown yes 2004-01-15 10:35:01: HMDS not functioning Message-ID: IPump changed and I ran ox and si wafers look good. Please report any problem you notice. From mahnaz at snf.stanford.edu Tue Jan 27 11:56:05 2004 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 27 Jan 2004 11:56:05 -0800 Subject: Problem yes 2004-01-15 10:34:21: not dispensing HMDS Message-ID: pump changed and ox and si wafers ran, looks good.