Problem yes 2004-01-09 11:45:58: Bad coating

daneman at snf.stanford.edu daneman at snf.stanford.edu
Fri Jan 9 11:45:59 PST 2004


Wafers coated on svgcoat(1 or 2) after the YES oven prime
have splotches (uncovered areas) around the edges of the 
wafer. Adding an svgcoat prime in addtion to the YES made the resist coating uniform.




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