Problem yes 2004-01-15 10:34:21: not dispensing HMDS
mahnaz at snf.stanford.edu
mahnaz at snf.stanford.edu
Tue Jan 27 11:56:05 PST 2004
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Problem yes 2004-01-15 10:34:21: not dispensing HMDS
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Shutdown yes 2004-01-15 10:35:01: HMDS not functioning
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pump changed and ox and si wafers ran, looks good.
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Problem yes 2004-01-15 10:34:21: not dispensing HMDS
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Shutdown yes 2004-01-15 10:35:01: HMDS not functioning
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