From aokyay at snf.stanford.edu  Fri Dec  2 17:26:37 2005
From: aokyay at snf.stanford.edu (aokyay at snf.stanford.edu)
Date: Fri, 2 Dec 2005 17:26:37 -0800
Subject: Problem yes SNF 2005-12-02 17:26:37: white dust
Message-ID: <mailman.72.1356284097.5434.yes-pcs@snf.stanford.edu>

deposits onto the surface of the wafers



From vilanova at snf.stanford.edu  Mon Dec  5 07:35:38 2005
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mon, 5 Dec 2005 07:35:38 -0800
Subject: Problem yes SNF 2005-12-02 17:26:37: white dust
Message-ID: <mailman.73.1356284097.5434.yes-pcs@snf.stanford.edu>

cleaned particles , cleaned shelfs door and seal gasket,
ok to use.