From leewy at snf.stanford.edu  Wed Sep  6 19:53:59 2006
From: leewy at snf.stanford.edu (leewy at snf.stanford.edu)
Date: Wed, 6 Sep 2006 19:53:59 -0700
Subject: Shutdown yes SNF 2006-09-06 19:53:59: alarm at step 6
Message-ID: <mailman.104.1356284097.5434.yes-pcs@snf.stanford.edu>

It made alarm after 15 minutes. I pushed "reset" and turned off the oven. My wafers are inside the oven. 



From vilanova at snf.stanford.edu  Thu Sep  7 07:06:28 2006
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Thu, 7 Sep 2006 07:06:28 -0700
Subject: Shutdown yes SNF 2006-09-06 19:53:59: alarm at step 6
Message-ID: <mailman.105.1356284097.5434.yes-pcs@snf.stanford.edu>

This Usually happens When you dont "CLose" the door
Properly, I will put your wafers Next to Yes Oven so you can 
come back and get them. 



From changyol at snf.stanford.edu  Thu Sep 28 08:07:10 2006
From: changyol at snf.stanford.edu (changyol at snf.stanford.edu)
Date: Thu, 28 Sep 2006 08:07:10 -0700
Subject: Problem yes SNF 2006-09-28 08:07:09: oven was not pump down.
Message-ID: <mailman.106.1356284097.5434.yes-pcs@snf.stanford.edu>

back and forth between prog 2 and prog 3 then stay there.



From changyol at snf.stanford.edu  Thu Sep 28 08:30:50 2006
From: changyol at snf.stanford.edu (changyol at snf.stanford.edu)
Date: Thu, 28 Sep 2006 08:30:50 -0700
Subject: Shutdown yes SNF 2006-09-28 08:30:50: were not pump down.
Message-ID: <mailman.107.1356284097.5434.yes-pcs@snf.stanford.edu>

vacuum leak thru hose?



From changyol at snf.stanford.edu  Thu Sep 28 11:57:33 2006
From: changyol at snf.stanford.edu (changyol at snf.stanford.edu)
Date: Thu, 28 Sep 2006 11:57:33 -0700
Subject: Problem yes SNF 2006-09-28 08:07:09: oven was not pump down.
Message-ID: <mailman.108.1356284097.5434.yes-pcs@snf.stanford.edu>

next statement please!



From changyol at snf.stanford.edu  Thu Sep 28 12:01:14 2006
From: changyol at snf.stanford.edu (changyol at snf.stanford.edu)
Date: Thu, 28 Sep 2006 12:01:14 -0700
Subject: Shutdown yes SNF 2006-09-28 08:30:50: were not pump down.
Message-ID: <mailman.109.1356284097.5434.yes-pcs@snf.stanford.edu>

leak was from vacuum hose connection at behind machine
and corrected,but door gasket does worn out little bit and 
need to get new one.mean while I increased pump down time from 2 min to 3 min for prog step 2 .machine ready to use.



From huangzb at snf.stanford.edu  Sat Sep 30 23:12:17 2006
From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu)
Date: Sat, 30 Sep 2006 23:12:17 -0700
Subject: Problem yes SNF 2006-09-30 23:12:17: rubber frame easily came off
Message-ID: <mailman.110.1356284097.5434.yes-pcs@snf.stanford.edu>