From ee410d at snf.stanford.edu Sat Feb 17 15:32:52 2007 From: ee410d at snf.stanford.edu (ee410d at snf.stanford.edu) Date: Sat, 17 Feb 2007 15:32:52 -0800 Subject: Problem yes SNF 2007-02-17 15:32:52: wont vent Message-ID: chamber wont vent, wafers stuck inside From bchui at snf.stanford.edu Sun Feb 18 18:17:42 2007 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sun, 18 Feb 2007 18:17:42 -0800 Subject: Problem yes SNF 2007-02-18 18:17:41: Alarmed during run Message-ID: Alarmed during run (about half way in). Hit start again, but same thing happened From bchui at snf.stanford.edu Sun Feb 18 18:29:46 2007 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sun, 18 Feb 2007 18:29:46 -0800 Subject: Shutdown yes SNF 2007-02-18 18:29:45: See previous problem report (alarms during run) Message-ID: Alarms during run; tried to start again and same thing happened. From emyers at snf.stanford.edu Mon Feb 19 09:35:42 2007 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 19 Feb 2007 09:35:42 -0800 Subject: Comment yes SNF 2007-02-19 09:35:41: Not at Atm at end of cycle Message-ID: At end of cycle , the chamber is not fully vented From mtang at snf.stanford.edu Tue Feb 20 16:39:16 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 20 Feb 2007 16:39:16 -0800 Subject: Shutdown yes SNF 2007-02-18 18:29:45: See previous problem report (alarms during run) Message-ID: Gosh, I hate writing this, but it was run 3 times without problem. We may need to adjust the vent pressure. Will leave the system in yellow, but it can be used. Please report any problems on Coral. We will check with Maintenance about the possibility of adjusting vent tomorrow. From vilanova at snf.stanford.edu Wed Feb 21 08:38:25 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 21 Feb 2007 08:38:25 -0800 Subject: Problem yes SNF 2007-02-17 15:32:52: wont vent Message-ID: this is the case of the user not closing the door properly, when the door is not close properly it does not reach the rest of the programs it gets stuck on program # 5 and then alarms and the door gets stuck under vacuum. I tested this morning and now is venting fine , I also Added HMDS to the flask and cleaned the seal gasket and shelfs . Ok to use From vilanova at snf.stanford.edu Wed Feb 21 08:38:40 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 21 Feb 2007 08:38:40 -0800 Subject: Problem yes SNF 2007-02-18 18:17:41: Alarmed during run Message-ID: Please read previous message. From vilanova at snf.stanford.edu Wed Feb 21 08:38:57 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 21 Feb 2007 08:38:57 -0800 Subject: Comment yes SNF 2007-02-19 09:35:41: Not at Atm at end of cycle Message-ID: please read previous message. From vilanova at snf.stanford.edu Fri Feb 23 07:46:52 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 23 Feb 2007 07:46:52 -0800 Subject: Shutdown yes SNF 2007-02-23 07:46:52: shutdown 4 maintenance Routine Message-ID: From rcrane at snf.stanford.edu Fri Feb 23 08:42:56 2007 From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu) Date: Fri, 23 Feb 2007 08:42:56 -0800 Subject: Shutdown yes SNF 2007-02-23 07:46:52: shutdown 4 maintenance Routine Message-ID: Maintenance complete. Door latch adjusted. Dick From mtang at snf.stanford.edu Fri Feb 23 09:36:13 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 23 Feb 2007 09:36:13 -0800 Subject: Comment yes SNF 2007-02-23 09:36:13: Latch repair Message-ID: Latch was rewelded and adjusted to ensure door is aligned when latched. The latch is now tighter - make sure the door is completely shut before latching.