From xhlim at snf.stanford.edu Thu Nov 1 10:47:18 2007 From: xhlim at snf.stanford.edu (xhlim at snf.stanford.edu) Date: Thu, 1 Nov 2007 10:47:18 -0700 Subject: Problem yes SNF 2007-11-01 10:47:17: Rubber seal loose at right bottom corner Message-ID: seal was coming off when door is open. manually pushed it into place. From huangzb at snf.stanford.edu Thu Nov 1 21:30:23 2007 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Thu, 1 Nov 2007 21:30:23 -0700 Subject: Problem yes SNF 2007-11-01 21:30:23: circulating between step 2 and 3 several times Message-ID: circulating between step 2 and 3 several times before proceeding to following steps. From gsosa at snf.stanford.edu Fri Nov 2 07:24:18 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 2 Nov 2007 07:24:18 -0700 Subject: Problem yes SNF 2007-11-01 21:30:23: circulating between step 2 and 3 several times Message-ID: This is the normal operation of the program. Steps 2 and 3 are chamber pump downs and Nitrogen purges. The program loops back to thes steps 2 or 3 times as part of the dehydration process and to remove oxygen from the chamber. When thes steps are completed the program continues on to the vapor prime portion of the program. From gibby at snf.stanford.edu Fri Nov 2 15:48:27 2007 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Fri, 2 Nov 2007 15:48:27 -0700 Subject: Problem yes SNF 2007-11-02 15:48:27: Yes oven alarmed Message-ID: oven alarmed; had to restart cycle. From dpb167 at snf.stanford.edu Fri Nov 2 16:43:52 2007 From: dpb167 at snf.stanford.edu (dpb167 at snf.stanford.edu) Date: Fri, 2 Nov 2007 16:43:52 -0700 Subject: Problem yes SNF 2007-11-02 16:43:52: Message-ID: YES oven alarm went off at step 6. From ehe at snf.stanford.edu Sun Nov 4 17:35:55 2007 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Sun, 4 Nov 2007 17:35:55 -0800 Subject: Comment yes SNF 2007-11-04 17:35:54: Yes oven alarmed Message-ID: oven alarmed at step 6, had to restart. Check door seal? From jparker at snf.stanford.edu Tue Nov 6 10:29:23 2007 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Tue, 6 Nov 2007 10:29:23 -0800 Subject: Comment yes SNF 2007-11-06 10:29:22: Error, reset once Message-ID: Same as previously reported. Ran a second time and the process finished. From vilanova at snf.stanford.edu Tue Nov 6 15:06:53 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 6 Nov 2007 15:06:53 -0800 Subject: Comment yes SNF 2007-11-06 15:06:53: found coral box missing from YES oven . Message-ID: coral box was missing from Yes + Fusion , Installed a new coral box and tested it, ok to use. From ehe at snf.stanford.edu Wed Nov 7 21:28:48 2007 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Wed, 7 Nov 2007 21:28:48 -0800 Subject: Problem yes SNF 2007-11-07 21:28:48: exited routed at step 6 Message-ID: Couldn't reach vacuum - reset From vilanova at snf.stanford.edu Fri Nov 9 08:12:55 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 9 Nov 2007 08:12:55 -0800 Subject: Shutdown yes SNF 2007-11-09 08:12:55: SHutdown due to pump problems. Message-ID: pump failed several times already I will shut down the Oven until we get the spare pump ( it should be in today 11/09/07) sorry for the inconvinience. From gsosa at snf.stanford.edu Fri Nov 9 13:56:22 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 9 Nov 2007 13:56:22 -0800 Subject: Comment yes SNF 2007-11-09 13:56:22: Yes Status Message-ID: Yes oven is still down. Mech pump will be in on Monday afternoon. Did IPA leak checks on sytem. No leaks at door or fittings. I do suspect a leak at a weld at rear of chamber. Had a ~300 millitorr deflection when sprayed with IPA. From gsosa at snf.stanford.edu Mon Nov 12 15:48:48 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 12 Nov 2007 15:48:48 -0800 Subject: Comment yes SNF 2007-11-12 15:48:47: Yes status update Message-ID: We will be removing the Yes oven from the lab tomorrow. We need to dis-assemble it further so we can leak test the other welded seams on the chamber and repair as needed. From gsosa at snf.stanford.edu Fri Nov 16 14:38:43 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 16 Nov 2007 14:38:43 -0800 Subject: Shutdown yes SNF 2007-11-09 08:12:55: SHutdown due to pump problems. Message-ID: Son of YES oven is up and ready for use. The replacement YES oven is ready to go. DId 2 contact angle tests. Both wafers look good. 1st test 5 points ~ 63 degree contact angle. 2nd test 5 points ~ 66 degree contact angle. Please read the note on the front door regarding the alarm conditions. A steady state audible alarm and light indicate the process is complete. A rapid beeping and flashing light indicate a process abort for vacuum setpoint not reached. System is not yet hooked into coral. Please continue to enter any comments, observations or problems. GS From gsosa at snf.stanford.edu Fri Nov 16 14:40:01 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 16 Nov 2007 14:40:01 -0800 Subject: Comment yes SNF 2007-11-12 15:48:47: Yes status update Message-ID: Son of YES oven is up and ready for use. The replacement YES oven is ready to go. DId 2 contact angle tests. Both wafers look good. 1st test 5 points ~ 63 degree contact angle. 2nd test 5 points ~ 66 degree contact angle. Please read the note on the front door regarding the alarm conditions. A steady state audible alarm and light indicate the process is complete. A rapid beeping and flashing light indicate a process abort for vacuum setpoint not reached. System is not yet hooked into coral. Please continue to enter any comments, observations or problems. GS From gsosa at snf.stanford.edu Fri Nov 16 14:40:21 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 16 Nov 2007 14:40:21 -0800 Subject: Comment yes SNF 2007-11-09 13:56:22: Yes Status Message-ID: Son of YES oven is up and ready for use. The replacement YES oven is ready to go. DId 2 contact angle tests. Both wafers look good. 1st test 5 points ~ 63 degree contact angle. 2nd test 5 points ~ 66 degree contact angle. Please read the note on the front door regarding the alarm conditions. A steady state audible alarm and light indicate the process is complete. A rapid beeping and flashing light indicate a process abort for vacuum setpoint not reached. System is not yet hooked into coral. Please continue to enter any comments, observations or problems. GS From gsosa at snf.stanford.edu Fri Nov 16 14:42:21 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 16 Nov 2007 14:42:21 -0800 Subject: Problem yes SNF 2007-10-30 11:56:26: Yes Oven Prime Message-ID: Replacement YES oven up and ready to use. GS From gsosa at snf.stanford.edu Fri Nov 16 14:43:11 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 16 Nov 2007 14:43:11 -0800 Subject: Problem yes SNF 2007-10-31 15:23:33: Yes oven prime Message-ID: Replacement YES oven up and ready to use. GS From gsosa at snf.stanford.edu Fri Nov 16 14:43:23 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 16 Nov 2007 14:43:23 -0800 Subject: Problem yes SNF 2007-11-01 10:47:17: Rubber seal loose at right bottom corner Message-ID: Replacement YES oven up and ready to use. GS From gsosa at snf.stanford.edu Fri Nov 16 14:43:34 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 16 Nov 2007 14:43:34 -0800 Subject: Problem yes SNF 2007-11-02 15:48:27: Yes oven alarmed Message-ID: Replacement YES oven up and ready to use. GS From gsosa at snf.stanford.edu Fri Nov 16 14:43:45 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 16 Nov 2007 14:43:45 -0800 Subject: Problem yes SNF 2007-11-02 16:43:52: Message-ID: Replacement YES oven up and ready to use. GS From gsosa at snf.stanford.edu Fri Nov 16 14:44:08 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 16 Nov 2007 14:44:08 -0800 Subject: Problem yes SNF 2007-11-07 21:28:48: exited routed at step 6 Message-ID: Replacement YES oven up and ready to use. GS From gsosa at snf.stanford.edu Fri Nov 16 14:44:31 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 16 Nov 2007 14:44:31 -0800 Subject: Problem yes SNF 2007-10-24 00:41:20: important wafer left inside, can't open door Message-ID: Replacement YES oven up and ready to use. GS From gsosa at snf.stanford.edu Fri Nov 16 14:44:54 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 16 Nov 2007 14:44:54 -0800 Subject: Problem yes SNF 2007-10-23 10:02:38: set pressure not reached.... Message-ID: Replacement YES oven up and ready to use. GS From gsosa at snf.stanford.edu Fri Nov 16 16:10:26 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 16 Nov 2007 16:10:26 -0800 Subject: Comment yes SNF 2007-11-16 16:10:26: YES Oven Status Message-ID: The replacement YES oven is up and ready to go. DId 2 contact angle tests. Both wafers look good. 1st test 5 points ~ 63 degree contact angle. 2nd test 5 points ~ 66 degree contact angle. Please read the note on the front door regarding the alarm conditions. A steady state audible alarm and light indicate the process is complete. A rapid beeping and flashing light indicate a process abort for vacuum setpoint not reached. System is not yet hooked into coral. Please continue to enter any comments, observations or problems. GS From gsosa at snf.stanford.edu Mon Nov 19 12:03:32 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 19 Nov 2007 12:03:32 -0800 Subject: Comment yes SNF 2007-11-19 12:03:31: Coral Interlock Message-ID: The YES Oven is Coral interlocked again. Please begin to enable and disable through coral as before. From ehe at snf.stanford.edu Tue Nov 27 20:00:23 2007 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Tue, 27 Nov 2007 20:00:23 -0800 Subject: Comment yes SNF 2007-11-27 20:00:23: yes oven stinks Message-ID: When I opened the door, a bad/strong odor came out From tura at snf.stanford.edu Fri Nov 30 12:39:42 2007 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Fri, 30 Nov 2007 12:39:42 -0800 Subject: Comment yes SNF 2007-11-30 12:39:42: smell and PR nonuniformity Message-ID: I used YES oven 3 times in last 2 days, 2 times there was a bad smell coming from inside the oven and those times I got nonuniform PR (1.6um), whereas the 1 time when there was no smell I got good uniformity. Don't know if these are related but it' ssomething to look at. Also the same smell was in the AFM room yesterday. From gsosa at snf.stanford.edu Fri Nov 30 16:05:45 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 30 Nov 2007 16:05:45 -0800 Subject: Comment yes SNF 2007-11-27 20:00:23: yes oven stinks Message-ID: Cycled oven several times. No smell noticed. Verified process program. Checked pump oil and exhaust. All OK. From gsosa at snf.stanford.edu Fri Nov 30 16:06:11 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 30 Nov 2007 16:06:11 -0800 Subject: Comment yes SNF 2007-11-30 12:39:42: smell and PR nonuniformity Message-ID: Cycled oven several times. No smell noticed. Verified process program. Checked pump oil and exhaust. All OK.