Comment yes SNF 2007-11-30 12:39:42: smell and PR nonuniformity

tura at tura at
Fri Nov 30 12:39:42 PST 2007

I used YES oven 3 times in last 2 days, 2 times there was a bad smell coming from inside the oven and those times I got nonuniform PR (1.6um), whereas the 1 time when there was no smell I got good uniformity. Don't know if these are related but it' ssomething to look at. Also the same smell was in the AFM room yesterday. 

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