From vilanova at snf.stanford.edu Tue Oct 16 07:34:49 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 16 Oct 2007 07:34:49 -0700 Subject: Shutdown yes SNF 2007-10-16 07:34:48: onthly maintenance routine in progress...... Message-ID: From vilanova at snf.stanford.edu Tue Oct 16 08:08:01 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 16 Oct 2007 08:08:01 -0700 Subject: Shutdown yes SNF 2007-10-16 07:34:48: onthly maintenance routine in progress...... Message-ID: Maintenance Completed, Ready to use. From mahnaz at snf.stanford.edu Tue Oct 16 09:44:01 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 16 Oct 2007 09:44:01 -0700 Subject: Shutdown yes SNF 2007-10-16 09:44:01: high temp and vacuume issue Message-ID: same problem as yesterday From vilanova at snf.stanford.edu Tue Oct 16 10:22:07 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 16 Oct 2007 10:22:07 -0700 Subject: Shutdown yes SNF 2007-10-16 09:44:01: high temp and vacuume issue Message-ID: One of the steps was wrong, well keep an eye on it because it might be something else too. From mrobles at snf.stanford.edu Tue Oct 16 12:04:04 2007 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Tue, 16 Oct 2007 12:04:04 -0700 Subject: Shutdown yes SNF 2007-10-16 12:04:03: Complete light was flashing and alarm was beeping. Message-ID: Display was flashing, complete light was flashing, alarm was beeping. Pressed reset. Door is locked. Cannot get wafers out. From vilanova at snf.stanford.edu Tue Oct 16 15:28:19 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 16 Oct 2007 15:28:19 -0700 Subject: Comment yes SNF 2007-10-16 15:28:18: Vacuum Gauge Message-ID: We are experiencing some problems with the vacuum gauge we are trying to get one as soon as posible , people can use the track in the tracks and singe the wafers for 20 min( singe oven). sorry for the inconvinience. From gsosa at snf.stanford.edu Wed Oct 17 17:16:56 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 17 Oct 2007 17:16:56 -0700 Subject: Comment yes SNF 2007-10-17 17:16:54: Yes oven is still down Message-ID: Yes oven is still down. There is a problem related to the vacuum gauge/controller. We will order a new controller and replace ASAP. Please use track vapor prime on SVG's instead. GS/MV From gsosa at snf.stanford.edu Thu Oct 18 16:23:30 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 18 Oct 2007 16:23:30 -0700 Subject: Comment yes SNF 2007-10-18 16:23:29: Yes oven update Message-ID: Yes oven is still down. The vacuum controller needs to be replaced. We have ordered it and are expecting delivery tomorrow. The system controller( Minarik Controller) was replaced today. Reprogrammed and powered down to test the battery backup. All OK- No memory loss. Will continue working on system tomorrow. From gsosa at snf.stanford.edu Fri Oct 19 15:50:18 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 19 Oct 2007 15:50:18 -0700 Subject: Shutdown yes SNF 2007-10-16 12:04:03: Complete light was flashing and alarm was beeping. Message-ID: Checked and found G/P vacuum gauge not working correctly. Very erratic behavior. Replaced and set up new Granville/Phillips vacuum controller. Tested many times. System operating OK. Checked contact angle on 2 wafers- OK . 1st wafer Ave. 58.7 degrees. 2nd wafer ave. 61.9 degrees. System OK to use. GS From gsosa at snf.stanford.edu Fri Oct 19 15:51:03 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 19 Oct 2007 15:51:03 -0700 Subject: Comment yes SNF 2007-10-16 15:28:18: Vacuum Gauge Message-ID: Checked and found G/P vacuum gauge not working correctly. Very erratic behavior. Replaced and set up new Granville/Phillips vacuum controller. Tested many times. System operating OK. Checked contact angle on 2 wafers- OK . 1st wafer Ave. 58.7 degrees. 2nd wafer ave. 61.9 degrees. System OK to use. GS From gsosa at snf.stanford.edu Fri Oct 19 15:51:12 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 19 Oct 2007 15:51:12 -0700 Subject: Comment yes SNF 2007-10-17 17:16:54: Yes oven is still down Message-ID: Checked and found G/P vacuum gauge not working correctly. Very erratic behavior. Replaced and set up new Granville/Phillips vacuum controller. Tested many times. System operating OK. Checked contact angle on 2 wafers- OK . 1st wafer Ave. 58.7 degrees. 2nd wafer ave. 61.9 degrees. System OK to use. GS From gsosa at snf.stanford.edu Fri Oct 19 15:51:28 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 19 Oct 2007 15:51:28 -0700 Subject: Comment yes SNF 2007-10-18 16:23:29: Yes oven update Message-ID: Checked and found G/P vacuum gauge not working correctly. Very erratic behavior. Replaced and set up new Granville/Phillips vacuum controller. Tested many times. System operating OK. Checked contact angle on 2 wafers- OK . 1st wafer Ave. 58.7 degrees. 2nd wafer ave. 61.9 degrees. System OK to use. GS From wwang at snf.stanford.edu Sat Oct 20 10:57:26 2007 From: wwang at snf.stanford.edu (wwang at snf.stanford.edu) Date: Sat, 20 Oct 2007 10:57:26 -0700 Subject: Problem yes SNF 2007-10-20 10:57:25: can't open the door after all steps complete Message-ID: From mtang at snf.stanford.edu Mon Oct 22 09:26:49 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 22 Oct 2007 09:26:49 -0700 Subject: Problem yes SNF 2007-10-20 10:57:25: can't open the door after all steps complete Message-ID: The system has been run many times without problem since this report. Please report further problems. From megrubbs at snf.stanford.edu Tue Oct 23 10:02:39 2007 From: megrubbs at snf.stanford.edu (megrubbs at snf.stanford.edu) Date: Tue, 23 Oct 2007 10:02:39 -0700 Subject: Problem yes SNF 2007-10-23 10:02:38: set pressure not reached.... Message-ID: sample still inside From wwang at snf.stanford.edu Wed Oct 24 00:41:21 2007 From: wwang at snf.stanford.edu (wwang at snf.stanford.edu) Date: Wed, 24 Oct 2007 00:41:21 -0700 Subject: Problem yes SNF 2007-10-24 00:41:20: important wafer left inside, can't open door Message-ID: Dear maintainess staff, Due to set pressure not reached, I can't open door. I have an important wafer left inside, so when you fix the problem, could you please take the wafer out and put it in the wafer box with my name "Wei Wang (wwang)" ? Thanks a lot. Wei From dmckean at snf.stanford.edu Wed Oct 24 13:21:48 2007 From: dmckean at snf.stanford.edu (dmckean at snf.stanford.edu) Date: Wed, 24 Oct 2007 13:21:48 -0700 Subject: Shutdown yes SNF 2007-10-24 13:21:48: yes oven Message-ID: Oven alarm went off at step 6 due to inadequate vacuum. Please contact me to retrieve wafers. Thanks, Dennis McKean 408-667-1657 From gsosa at snf.stanford.edu Wed Oct 24 14:12:57 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 24 Oct 2007 14:12:57 -0700 Subject: Shutdown yes SNF 2007-10-24 13:21:48: yes oven Message-ID: Processed users wafers and tested system. There is an intermittant problem that we are aware of. We have parts on order to try and repair the problem. GS From gsosa at snf.stanford.edu Fri Oct 26 12:07:45 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 26 Oct 2007 12:07:45 -0700 Subject: Shutdown yes SNF 2007-10-26 12:07:44: Replacing transducer tube Message-ID: Replacing the transducer tube for the Granville-Phillips vacuum gauge. GS From gsosa at snf.stanford.edu Fri Oct 26 13:04:54 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 26 Oct 2007 13:04:54 -0700 Subject: Shutdown yes SNF 2007-10-26 12:07:44: Replacing transducer tube Message-ID: Replaced the transducewr tube for the vacuum gauge. System is in same Yellow status. Tool is usable. Notify maintenance or comments in coral if any issues. GS From gsosa at snf.stanford.edu Fri Oct 26 16:02:45 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 26 Oct 2007 16:02:45 -0700 Subject: Comment yes SNF 2007-10-26 16:02:45: Message-ID: Replaced the transducer tube for the vacuum gauge. System is in same Yellow status. Tool is up and usable. Please notify maintenance or enter comments in coral if there are any issues. GS From gsosa at snf.stanford.edu Fri Oct 26 16:03:48 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 26 Oct 2007 16:03:48 -0700 Subject: Comment yes SNF 2007-10-26 16:03:47: YES oven status Message-ID: Replaced the transducer tube for the vacuum gauge. System is in same Yellow status. Tool is up and usable. Please notify maintenance or enter comments in coral if there are any issues. GS From gsosa at snf.stanford.edu Mon Oct 29 09:15:54 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 29 Oct 2007 09:15:54 -0700 Subject: Shutdown yes SNF 2007-10-29 09:15:53: Working on vacuum issues Message-ID: Troubleshooting vacuum problems. From gsosa at snf.stanford.edu Mon Oct 29 13:12:04 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 29 Oct 2007 13:12:04 -0700 Subject: Shutdown yes SNF 2007-10-29 09:15:53: Working on vacuum issues Message-ID: Troubleshot for leaks. Isolated flask from system. Still same vacuum levels. Leak is not in flask. Reconnected and tested. Yes oven OK to use but still in yellow. We will continue to monitor and troubleshoot. GS From gsosa at snf.stanford.edu Mon Oct 29 13:12:53 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 29 Oct 2007 13:12:53 -0700 Subject: Comment yes SNF 2007-10-29 13:12:53: YES oven status Message-ID: Troubleshot for leaks. Isolated flask from system. Still same vacuum levels. Leak is not in flask. Reconnected and tested. Yes oven OK to use but still in yellow. We will continue to monitor and troubleshoot. GS From calarrudo at snf.stanford.edu Tue Oct 30 11:56:26 2007 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Tue, 30 Oct 2007 11:56:26 -0700 Subject: Problem yes SNF 2007-10-30 11:56:26: Yes Oven Prime Message-ID: Alarmed half way through cycle had to do reset. From calarrudo at snf.stanford.edu Wed Oct 31 15:23:33 2007 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Wed, 31 Oct 2007 15:23:33 -0700 Subject: Problem yes SNF 2007-10-31 15:23:33: Yes oven prime Message-ID: Yesterday and today yes oven alarmed had to be restarted.