Shutdown yes SNF 2007-10-16 12:04:03: Complete light was flashing and alarm was beeping.

gsosa at gsosa at
Fri Oct 19 15:50:18 PDT 2007

Checked and found G/P vacuum gauge not working correctly. Very erratic behavior. Replaced and set up new Granville/Phillips vacuum controller. Tested many times. System operating OK. Checked contact angle on 2 wafers- OK . 1st wafer Ave. 58.7 degrees. 2nd wafer ave. 61.9 degrees. System OK to use.  GS  

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