Comment yes SNF 2007-10-17 17:16:54: Yes oven is still down

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Oct 19 15:51:12 PDT 2007


Checked and found G/P vacuum gauge not working correctly. Very erratic behavior. Replaced and set up new Granville/Phillips vacuum controller. Tested many times. System operating OK. Checked contact angle on 2 wafers- OK . 1st wafer Ave. 58.7 degrees. 2nd wafer ave. 61.9 degrees. System OK to use.  GS  




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