From cmcg at snf.stanford.edu Tue Feb 5 10:13:18 2008 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Tue, 5 Feb 2008 10:13:18 -0800 Subject: Comment yes SNF 2008-02-05 10:13:17: stinky Message-ID: smells more like chemicals than musk..... From mahnaz at snf.stanford.edu Fri Feb 8 08:47:34 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 8 Feb 2008 08:47:34 -0800 Subject: Shutdown yes SNF 2008-02-08 08:47:34: resist wafer was ran Message-ID: in the system some times last night. From gsosa at snf.stanford.edu Fri Feb 8 14:50:06 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 8 Feb 2008 14:50:06 -0800 Subject: Shutdown yes SNF 2008-02-08 08:47:34: resist wafer was ran Message-ID: Cooled off the oven. Wiped downthe interior and the door with acetone followed by IPA. Replaced the door seal. Also added 2 vacuum and N2 cycles after the vapor prime steps thoroghly evacuate the chamber of any residual HMDS. The 2 additionalvacuum / purge cyclesw add about 6 minutes to the process. From dtschoen at snf.stanford.edu Mon Feb 11 09:31:34 2008 From: dtschoen at snf.stanford.edu (dtschoen at snf.stanford.edu) Date: Mon, 11 Feb 2008 09:31:34 -0800 Subject: Comment yes SNF 2008-02-11 09:31:34: Cassette in center dump rinser Message-ID: Someone left a teflon cassette in the center dump rinser. They seem to have made away with the box for it, so I can't put it away. From dtschoen at snf.stanford.edu Mon Feb 11 09:35:23 2008 From: dtschoen at snf.stanford.edu (dtschoen at snf.stanford.edu) Date: Mon, 11 Feb 2008 09:35:23 -0800 Subject: Comment yes SNF 2008-02-11 09:35:23: Ignore last comment Message-ID: Wrong piece of equipment. Sorry. From mahnaz at snf.stanford.edu Mon Feb 11 16:22:23 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 11 Feb 2008 16:22:23 -0800 Subject: Comment yes SNF 2008-02-11 09:31:34: Cassette in center dump rinser Message-ID: wrong equip. From mahnaz at snf.stanford.edu Mon Feb 11 16:22:42 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 11 Feb 2008 16:22:42 -0800 Subject: Comment yes SNF 2008-02-11 09:35:23: Ignore last comment Message-ID: ignoring it. From ofidaner at snf.stanford.edu Sun Feb 17 09:39:19 2008 From: ofidaner at snf.stanford.edu (ofidaner at snf.stanford.edu) Date: Sun, 17 Feb 2008 09:39:19 -0800 Subject: Shutdown yes SNF 2008-02-17 09:39:18: program cannot be started Message-ID: From shott at snf.stanford.edu Sun Feb 17 11:11:01 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sun, 17 Feb 2008 11:11:01 -0800 Subject: Shutdown yes SNF 2008-02-17 09:39:18: program cannot be started Message-ID: Renata has asked me to clear this shutdown so that she can do a little more testing of the "program load" problem. She will place a note on it so that others will not use it while she is experimenting. John From rmelamud at snf.stanford.edu Sun Feb 17 11:42:11 2008 From: rmelamud at snf.stanford.edu (rmelamud at snf.stanford.edu) Date: Sun, 17 Feb 2008 11:42:11 -0800 Subject: Problem yes SNF 2008-02-17 11:42:11: Not Starting Message-ID: Oven is in "Reset" mode. When "Start" button is pressed the oven doesn't go into program. Instead, program reads: IF0000. There is no attempt to pump down. Not red lighted in hope that someone might know how to fix. From vilanova at snf.stanford.edu Tue Feb 19 07:33:27 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 19 Feb 2008 07:33:27 -0800 Subject: Problem yes SNF 2008-02-17 11:42:11: Not Starting Message-ID: I dont know why the oven was like that, but I enalbe it and checked the programs and every single one of them is there I,m running a test right now. seems to be ok. From vilanova at snf.stanford.edu Tue Feb 19 07:34:45 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 19 Feb 2008 07:34:45 -0800 Subject: Comment yes SNF 2008-02-05 10:13:17: stinky Message-ID: NO bad fumes or strange smells from oven since we changed the gasket and added a few more steps to it. From vilanova at snf.stanford.edu Tue Feb 19 07:34:54 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 19 Feb 2008 07:34:54 -0800 Subject: Problem yes SNF 2008-01-23 10:33:16: killer smell Message-ID: NO bad fumes or strange smells from oven since we changed the gasket and added a few more steps to it. From vilanova at snf.stanford.edu Tue Feb 19 07:35:09 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 19 Feb 2008 07:35:09 -0800 Subject: Comment yes SNF 2008-01-23 15:42:02: YES Oven status Message-ID: NO bad fumes or strange smells from oven since we changed the gasket and added a few more steps to it.