Shutdown yes SNF 2008-02-08 08:47:34: resist wafer was ran

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Feb 8 14:50:06 PST 2008


Cooled off the oven. Wiped downthe interior and the door with acetone followed by IPA. Replaced the door seal. Also added 2 vacuum and N2 cycles after the vapor prime steps thoroghly evacuate the chamber of any residual HMDS. The  2 additionalvacuum / purge cyclesw add about 6 minutes to the process.  




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