From mahnaz at snf.stanford.edu  Thu Jan  3 14:10:42 2008
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Thu, 3 Jan 2008 14:10:42 -0800
Subject: Shutdown yes SNF 2008-01-03 14:10:40: smells real bad
Message-ID: <mailman.210.1356284098.5434.yes-pcs@snf.stanford.edu>




From gsosa at snf.stanford.edu  Fri Jan  4 15:42:26 2008
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Fri, 4 Jan 2008 15:42:26 -0800
Subject: Shutdown yes SNF 2008-01-03 14:10:40: smells real bad
Message-ID: <mailman.211.1356284098.5434.yes-pcs@snf.stanford.edu>

Ran cycle test. oven smells OK. will monitor.



From gsosa at snf.stanford.edu  Fri Jan  4 15:43:26 2008
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Fri, 4 Jan 2008 15:43:26 -0800
Subject: Shutdown yes SNF 2007-12-19 07:22:21: shutdown
Message-ID: <mailman.212.1356284098.5434.yes-pcs@snf.stanford.edu>

Oven turned back on. verified program and tested. All Ok.  



From mahnaz at snf.stanford.edu  Wed Jan 23 10:33:16 2008
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Wed, 23 Jan 2008 10:33:16 -0800
Subject: Problem yes SNF 2008-01-23 10:33:16: killer smell
Message-ID: <mailman.213.1356284098.5434.yes-pcs@snf.stanford.edu>

needs to be checked immidately.



From mahnaz at snf.stanford.edu  Wed Jan 23 11:18:43 2008
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Wed, 23 Jan 2008 11:18:43 -0800
Subject: Shutdown yes SNF 2008-01-23 11:18:42: after I ran my wafers and took 
Message-ID: <mailman.214.1356284098.5434.yes-pcs@snf.stanford.edu>

them out  I could not smell anything. 
I left the system to sit for 20 minutes and opened it
smells pretty bad.



From gsosa at snf.stanford.edu  Wed Jan 23 15:40:58 2008
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Wed, 23 Jan 2008 15:40:58 -0800
Subject: Shutdown yes SNF 2008-01-23 11:18:42: after I ran my wafers and took 
Message-ID: <mailman.215.1356284098.5434.yes-pcs@snf.stanford.edu>

No smells after 2 vapor prime process cycles. The smell does not appear to be HMDS, but a musty type odor. Cleaned the door seal chanel- there was some sort of residue. will order and install a new door seal. Will continue to monitor and test system.



From gsosa at snf.stanford.edu  Wed Jan 23 15:42:02 2008
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Wed, 23 Jan 2008 15:42:02 -0800
Subject: Comment yes SNF 2008-01-23 15:42:02: YES Oven status
Message-ID: <mailman.216.1356284098.5434.yes-pcs@snf.stanford.edu>

No smells after 2 vapor prime process cycles. The smell does not appear to be HMDS, but a musty type odor. Cleaned the door seal chanel- there was some sort of residue. will order and install a new door seal. Will continue to monitor and test system.