Shutdown yes SNF 2008-01-23 11:18:42: after I ran my wafers and took

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Jan 23 15:40:58 PST 2008


No smells after 2 vapor prime process cycles. The smell does not appear to be HMDS, but a musty type odor. Cleaned the door seal chanel- there was some sort of residue. will order and install a new door seal. Will continue to monitor and test system.




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