From raneeyoo at snf.stanford.edu Wed Mar 5 02:39:49 2008 From: raneeyoo at snf.stanford.edu (raneeyoo at snf.stanford.edu) Date: Wed, 5 Mar 2008 02:39:49 -0800 Subject: Comment yes SNF 2008-03-05 02:39:49: no teflon dish Message-ID: From mahnaz at snf.stanford.edu Mon Mar 17 13:51:55 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 17 Mar 2008 13:51:55 -0700 Subject: Problem yes SNF 2008-03-17 13:51:54: smelled when i opened Message-ID: before running it. From vilanova at snf.stanford.edu Tue Mar 18 07:38:21 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 18 Mar 2008 07:38:21 -0700 Subject: Problem yes SNF 2008-03-17 13:51:54: smelled when i opened Message-ID: Checked The System Before and After Run Cycle and I could not Repeat the problem, I Cleaned the Gasket & Shelf. ok to use, Report ant issues on coral. From gyama at snf.stanford.edu Wed Mar 19 10:22:46 2008 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Wed, 19 Mar 2008 10:22:46 -0700 Subject: Shutdown yes SNF 2008-03-19 10:22:45: press not reaching set pt, error #21 Message-ID: From vilanova at snf.stanford.edu Wed Mar 19 11:09:58 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 19 Mar 2008 11:09:58 -0700 Subject: Shutdown yes SNF 2008-03-19 10:22:45: press not reaching set pt, error #21 Message-ID: The Pump Was low On Oil, I added oil to it and ran an entire cycled , pump works good, also always check the seal ( grey ) gasket before you put in your wafers, sometimes it comes out lose. From gsosa at snf.stanford.edu Thu Mar 20 06:34:36 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 20 Mar 2008 06:34:36 -0700 Subject: Shutdown yes SNF 2008-03-20 06:34:35: High temp bakeout Message-ID: Bakeout of chamber at 200 deg. to try and eliminate the intermittant odors. From gsosa at snf.stanford.edu Thu Mar 20 10:46:19 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 20 Mar 2008 10:46:19 -0700 Subject: Shutdown yes SNF 2008-03-20 06:34:35: High temp bakeout Message-ID: Bakeout completed. Reset the temperature to 150 degrees and stabilized. Cycle tested the oven. System OK to use. From uli at snf.stanford.edu Thu Mar 20 17:50:16 2008 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Thu, 20 Mar 2008 17:50:16 -0700 Subject: Problem yes SNF 2008-03-20 17:50:14: smells really bad!!! Message-ID: I opend the door and it smelled like HMDS!!! From gsosa at snf.stanford.edu Fri Mar 21 08:11:15 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 21 Mar 2008 08:11:15 -0700 Subject: Shutdown yes SNF 2008-03-21 08:11:14: Rebuilding Nupro Valve Message-ID: Rebuilding the nupro valve on the HMDS delivery line. From gsosa at snf.stanford.edu Fri Mar 21 14:23:22 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 21 Mar 2008 14:23:22 -0700 Subject: Shutdown yes SNF 2008-03-21 08:11:14: Rebuilding Nupro Valve Message-ID: Rebuilt the Nupro valve between the HMDS flask and the chamber. Leak checked valve- OK. Also found errors on the new programming sheet which caused problems in the execution of the process program. Most likely, this caused the bad smell. The process program is now correct and the program sheet will also be corrected. Checked for smells- OK. Checked contact angle- OK ( C= 68.6 deg, T= 69.4, B= 67.7, L= 67.5, R=69.9) From gsosa at snf.stanford.edu Fri Mar 21 14:23:56 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 21 Mar 2008 14:23:56 -0700 Subject: Problem yes SNF 2008-03-20 17:50:14: smells really bad!!! Message-ID: Rebuilt the Nupro valve between the HMDS flask and the chamber. Leak checked valve- OK. Also found errors on the new programming sheet which caused problems in the execution of the process program. Most likely, this caused the bad smell. The process program is now correct and the program sheet will also be corrected. Checked for smells- OK. Checked contact angle- OK ( C= 68.6 deg, T= 69.4, B= 67.7, L= 67.5, R=69.9) From chughes at snf.stanford.edu Fri Mar 28 09:35:13 2008 From: chughes at snf.stanford.edu (chughes at snf.stanford.edu) Date: Fri, 28 Mar 2008 09:35:13 -0700 Subject: Comment yes SNF 2008-03-28 09:35:12: Door Seal Message-ID: It often seems like the door seal comes loose, and is the primary reason for the yes oven faulting. It's good to check it to make sure it's sitting correctly before starting the oven.