Problem yes SNF 2008-03-20 17:50:14: smells really bad!!!

gsosa at gsosa at
Fri Mar 21 14:23:56 PDT 2008

Rebuilt the Nupro valve between the HMDS flask and the chamber. Leak checked valve- OK. Also found errors on the new programming sheet which caused problems in the execution of the process program. Most likely, this caused the bad smell. The process program is now correct and the program sheet will also be corrected. Checked for smells- OK. Checked contact angle- OK ( C= 68.6 deg, T= 69.4, B= 67.7, L= 67.5, R=69.9) 

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