From masaharu at snf.stanford.edu Sun May 4 23:47:22 2008 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Sun, 4 May 2008 23:47:22 -0700 Subject: Shutdown yes SNF 2008-05-04 23:47:21: Message-ID: From masaharu at snf.stanford.edu Sun May 4 23:49:18 2008 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Sun, 4 May 2008 23:49:18 -0700 Subject: Comment yes SNF 2008-05-04 23:49:18: accidental shutdown Message-ID: I apologize that I accidentally shut it down. There is absolutely no problem. From gsosa at snf.stanford.edu Mon May 5 08:15:32 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 5 May 2008 08:15:32 -0700 Subject: Shutdown yes SNF 2008-05-04 23:47:21: Message-ID: Refilled the HMDS flask and ran a test cycle. All OK. From gsosa at snf.stanford.edu Thu May 8 11:05:12 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 8 May 2008 11:05:12 -0700 Subject: Shutdown yes SNF 2008-05-08 11:05:12: Resist lifting Message-ID: User had resist lifting after yes oven prime. Will check program and contact angle. From gsosa at snf.stanford.edu Thu May 8 13:17:55 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 8 May 2008 13:17:55 -0700 Subject: Shutdown yes SNF 2008-05-08 11:05:12: Resist lifting Message-ID: Checked program-OK Checked pump oil- OK Ran 2 cycle tests with 2 wafers each(clean bare silicon) and measured contact angle. All OK Ave contact angle 69 deg. System OK to use. Please report in coral if you have any adhesion problems. From vilanova at snf.stanford.edu Fri May 9 07:20:08 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 9 May 2008 07:20:08 -0700 Subject: Shutdown yes SNF 2008-05-09 07:20:07: Monthly Pm & lamp change In progress.................. Message-ID: From vilanova at snf.stanford.edu Fri May 9 07:37:42 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 9 May 2008 07:37:42 -0700 Subject: Shutdown yes SNF 2008-05-09 07:20:07: Monthly Pm & lamp change In progress.................. Message-ID: Sorry Wrong One,But I refilled the flask and cleaned the Gasket. From vilanova at snf.stanford.edu Fri May 9 07:38:44 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 9 May 2008 07:38:44 -0700 Subject: Comment yes SNF 2008-03-05 02:39:49: no teflon dish Message-ID: Mahnaz Got a new Teflon DIsh for pieces is on top of the Yes oven please do not take it out of that area. From vilanova at snf.stanford.edu Fri May 9 07:38:57 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 9 May 2008 07:38:57 -0700 Subject: Comment yes SNF 2008-05-04 23:49:18: accidental shutdown Message-ID: cleared.