From gsosa at snf.stanford.edu Thu Jun 25 09:45:20 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 25 Jun 2009 09:45:20 -0700 Subject: Shutdown yes SNF 2009-06-25 09:45:19: Vacuum problem Message-ID: Working on vacuum problem. From gsosa at snf.stanford.edu Thu Jun 25 11:05:16 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 25 Jun 2009 11:05:16 -0700 Subject: Shutdown yes SNF 2009-06-25 09:45:19: Vacuum problem Message-ID: System only pumping down to 1.4 Torr. Replaced door gasket- still same. Troubleshot and determined that N2 purge valve not sealing and was leaking N2 into chamber. Replaced valve seat in nupro valve. System base pressure now 80 MilliTorr in 10 minutes. Chamber leakup < 10 Mt/min. Ran test cycle and checked contact angle- OK. Contact angle- Ave.(5 points): 70.1 Deg. System OK to use.