Shutdown yes SNF 2009-06-25 09:45:19: Vacuum problem

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Jun 25 11:05:16 PDT 2009


System only pumping down to 1.4 Torr. Replaced door gasket- still same. Troubleshot and determined that N2 purge valve not sealing and was leaking N2 into chamber. Replaced valve seat in nupro valve. System base pressure now 80 MilliTorr in 10 minutes. Chamber leakup < 10 Mt/min.  Ran test cycle and checked contact angle- OK. Contact angle- Ave.(5 points): 70.1 Deg. System OK to use.




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