From masaharu at snf.stanford.edu Fri May 1 04:54:45 2009 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Fri, 1 May 2009 04:54:45 -0700 Subject: Problem yes SNF 2009-05-01 04:54:44: Display doesn't show anything Message-ID: Display doesn't show anything and furthermore I couldn't start running From vilanova at snf.stanford.edu Fri May 1 08:17:17 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 1 May 2009 08:17:17 -0700 Subject: Shutdown yes SNF 2009-05-01 08:17:17: testing and checking programs -steps COntroller Message-ID: From gsosa at snf.stanford.edu Fri May 1 10:02:19 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 1 May 2009 10:02:19 -0700 Subject: Shutdown yes SNF 2009-05-01 08:17:17: testing and checking programs -steps COntroller Message-ID: The system controller died( No display) Changed out the controller. Verified program. Tested operation. All OK From gsosa at snf.stanford.edu Fri May 1 10:02:37 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 1 May 2009 10:02:37 -0700 Subject: Problem yes SNF 2009-05-01 04:54:44: Display doesn't show anything Message-ID: The system controller died( No display) Changed out the controller. Verified program. Tested operation. All OK From uli at snf.stanford.edu Tue May 12 11:03:04 2009 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 12 May 2009 11:03:04 -0700 Subject: Problem yes SNF 2009-05-12 11:03:03: HMDS smell Message-ID: While I opened the door I smelled HMDS. From vilanova at snf.stanford.edu Wed May 13 08:08:24 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 13 May 2009 08:08:24 -0700 Subject: Problem yes SNF 2009-05-12 11:03:03: HMDS smell Message-ID: Ran Cycled test , check for HMDS FUmes after End On Cycle, No HMDS Smell At all, I couldnt Repeat the Problem , Ok to use. From gth at snf.stanford.edu Sat May 16 13:44:19 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Sat, 16 May 2009 13:44:19 -0700 Subject: Problem yes SNF 2009-05-16 13:44:19: yes oven cassette- stained and dirty. Message-ID: placed bad cassette on top of Mahnaz blue oven. It was sitting outside for many days. From sclaussen at snf.stanford.edu Sun May 17 18:46:30 2009 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Sun, 17 May 2009 18:46:30 -0700 Subject: Problem yes SNF 2009-05-17 18:46:29: Resist not sticking Message-ID: We did our normal litho process this evening (O2 descum, YES oven, spun 3612, exposed, developed in MF-26A) and many of our features were gone. Some had "floated" off of their position and landed, in tack, on another part of the piece. Our hypothesis is that there was a problem with the prime. We're starting again to see if it works. From vilanova at snf.stanford.edu Mon May 18 08:06:37 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 18 May 2009 08:06:37 -0700 Subject: Problem yes SNF 2009-05-16 13:44:19: yes oven cassette- stained and dirty. Message-ID: Cleaned Cassette And YEs Oven chamber and gasket aswell . From gsosa at snf.stanford.edu Mon May 18 09:10:43 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 18 May 2009 09:10:43 -0700 Subject: Problem yes SNF 2009-05-17 18:46:29: Resist not sticking Message-ID: Checked process program- OK. Processed a test wafer and checked contact angle-OK ( average of 5 points ~63 Degrees). Oven OK to use.