From sdogbe at snf.stanford.edu Mon Oct 5 19:35:22 2009 From: sdogbe at snf.stanford.edu (sdogbe at snf.stanford.edu) Date: Mon, 5 Oct 2009 19:35:22 -0700 Subject: Shutdown yes SNF 2009-10-05 19:35:21: Pressure gauge not working Message-ID: Pressure gauge is malfunctioning. After step 12, tool skipped back to steps 2 and 3 loops for over an hour. From vilanova at snf.stanford.edu Tue Oct 6 08:08:07 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 6 Oct 2009 08:08:07 -0700 Subject: Shutdown yes SNF 2009-10-05 19:35:21: Pressure gauge not working Message-ID: SOmeone changed One of the steps for one of the programs, checked programs, re-entered All the right steps and times Cycled ,Everything looks good back to normal, Ok to use. Please Do NOT TOuch the programs Settings if something is not working Fine Reported and shutdown On CORAL! From mtang at snf.stanford.edu Wed Oct 7 16:30:27 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 7 Oct 2009 16:30:27 -0700 Subject: Problem yes SNF 2009-10-07 16:30:26: Door stuck Message-ID: A labmember could not open the door. This was after a run had been completed and the system had been (as far as we can tell) empty and idle. From gsosa at snf.stanford.edu Thu Oct 8 08:49:20 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 8 Oct 2009 08:49:20 -0700 Subject: Problem yes SNF 2009-10-07 16:30:26: Door stuck Message-ID: Verified the process steps- All OK. Refilled and pumped down flask. Tested system by running process program- All OK. From mahnaz at snf.stanford.edu Mon Oct 26 20:02:24 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 26 Oct 2009 20:02:24 -0700 Subject: Problem yes SNF 2009-10-26 20:02:23: smell/odor Message-ID: a labmember has reported smell problem on the system. When you open the system ,if notice any strong smell or any unusual odor, please shut the system down immidately. From alsune at snf.stanford.edu Mon Oct 26 20:42:41 2009 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Mon, 26 Oct 2009 20:42:41 -0700 Subject: Problem yes SNF 2009-10-26 20:42:41: smell and auto start? Message-ID: After reading the previous message,I opened the oven to confirm. Indeed, there was this strange odor. I retrieved my sample and closed the door and to my suprise the machine started by itself. I'm confident that I didn't even come close touching the start button. From vilanova at snf.stanford.edu Tue Oct 27 08:20:30 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 27 Oct 2009 08:20:30 -0700 Subject: Problem yes SNF 2009-10-26 20:02:23: smell/odor Message-ID: Cycled Entire System Loop , checked leaks Odors and programs, I could not Find Any leaks or Odors In the chamber area , All the programas are fine, I enable it and disable it several times and started the system a couple of times aswell and I couldnt repeat any of the problems From last night, I cleaned Up the chamber Just in case and re started the system One more time and At the end of cycled THERE WAS NO CHEMICAL SMELLS ANYWHERE. From vilanova at snf.stanford.edu Tue Oct 27 08:20:35 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 27 Oct 2009 08:20:35 -0700 Subject: Problem yes SNF 2009-10-26 20:42:41: smell and auto start? Message-ID: Cycled Entire System Loop , checked leaks Odors and programs, I could not Find Any leaks or Odors In the chamber area , All the programas are fine, I enable it and disable it several times and started the system a couple of times aswell and I couldnt repeat any of the problems From last night, I cleaned Up the chamber Just in case and re started the system One more time and At the end of cycled THERE WAS NO CHEMICAL SMELLS ANYWHERE. From ywidjaja at snf.stanford.edu Wed Oct 28 05:14:07 2009 From: ywidjaja at snf.stanford.edu (ywidjaja at snf.stanford.edu) Date: Wed, 28 Oct 2009 05:14:07 -0700 Subject: Problem yes SNF 2009-10-28 05:14:06: P-FAIL error message Message-ID: After I unload my wafer, it gave a P-FAIL error message. Next user gets "01CT0000" upon Start. From ofidaner at snf.stanford.edu Wed Oct 28 06:52:13 2009 From: ofidaner at snf.stanford.edu (ofidaner at snf.stanford.edu) Date: Wed, 28 Oct 2009 06:52:13 -0700 Subject: Shutdown yes SNF 2009-10-28 06:52:13: program does not start Message-ID: It shows 01 CT 0000 on the display From vilanova at snf.stanford.edu Wed Oct 28 08:17:42 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 28 Oct 2009 08:17:42 -0700 Subject: Shutdown yes SNF 2009-10-28 06:52:13: program does not start Message-ID: Re entered all the program and steps cycled it , system back to normal AND THERES NO SMELLS! From vilanova at snf.stanford.edu Wed Oct 28 08:17:55 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 28 Oct 2009 08:17:55 -0700 Subject: Problem yes SNF 2009-10-28 05:14:06: P-FAIL error message Message-ID: READ PREVIOUS MESSAGE. - From ehe at snf.stanford.edu Fri Oct 30 20:36:11 2009 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Fri, 30 Oct 2009 20:36:11 -0700 Subject: Problem yes SNF 2009-10-30 20:36:10: not working Message-ID: Stays in 01CT0000 when reset and restarted; waited 10 mins nothing happened. Tried disable/enable and reset several times. Heat is working but set at 153C. From ehe at snf.stanford.edu Fri Oct 30 21:42:16 2009 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Fri, 30 Oct 2009 21:42:16 -0700 Subject: Shutdown yes SNF 2009-10-30 21:42:15: not working Message-ID: From ericp at snf.stanford.edu Sat Oct 31 02:04:42 2009 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sat, 31 Oct 2009 02:04:42 -0700 Subject: Comment yes SNF 2009-10-31 02:04:41: Ok- Message-ID: seems to have lost power.... From shott at snf.stanford.edu Sat Oct 31 12:46:04 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 31 Oct 2009 12:46:04 -0700 Subject: Shutdown yes SNF 2009-10-30 21:42:15: not working Message-ID: Eric was apparently able to clear the problems so I'm clearing the shutdown so that it can be used this weekend. John From shott at snf.stanford.edu Sat Oct 31 12:46:11 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 31 Oct 2009 12:46:11 -0700 Subject: Problem yes SNF 2009-10-30 20:36:10: not working Message-ID: Eric was apparently able to clear the problems so I'm clearing the shutdown so that it can be used this weekend. John