From ntayebi at snf.stanford.edu Mon Aug 23 11:26:38 2010 From: ntayebi at snf.stanford.edu (ntayebi at snf.stanford.edu) Date: Mon, 23 Aug 2010 11:26:38 -0700 Subject: Shutdown yes SNF 2010-08-23 11:26:37: shutdown Message-ID: From ntayebi at snf.stanford.edu Mon Aug 23 11:27:37 2010 From: ntayebi at snf.stanford.edu (ntayebi at snf.stanford.edu) Date: Mon, 23 Aug 2010 11:27:37 -0700 Subject: Shutdown yes SNF 2010-08-23 11:27:37: shutdown Message-ID: THere was a misunderstanding and I thought cycle was done. I pressed reset while the pressure was high. Previous user's wafers are still inside. From gsosa at snf.stanford.edu Mon Aug 23 14:51:08 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 23 Aug 2010 14:51:08 -0700 Subject: Shutdown yes SNF 2010-08-23 11:27:37: shutdown Message-ID: Chamber under vacuum. Unknown where process was aborted. Ran the system through a pump/puge cycle to evacuate any HMDs byproducts. Vented chamber and removed users samples. Unknown whether thay recieved the vapor prime steps. System is back up and ready to use. From gsosa at snf.stanford.edu Mon Aug 23 14:51:19 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 23 Aug 2010 14:51:19 -0700 Subject: Shutdown yes SNF 2010-08-23 11:26:37: shutdown Message-ID: Chamber under vacuum. Unknown where process was aborted. Ran the system through a pump/puge cycle to evacuate any HMDs byproducts. Vented chamber and removed users samples. Unknown whether thay recieved the vapor prime steps. System is back up and ready to use.