Shutdown yes SNF 2010-08-23 11:27:37: shutdown

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Aug 23 14:51:08 PDT 2010


Chamber under vacuum. Unknown where process was aborted.  Ran the system through a pump/puge cycle to evacuate any HMDs byproducts. Vented chamber and removed users samples. Unknown whether thay recieved the vapor prime steps. System is back up and ready to use.




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