From nharjee at snf.stanford.edu  Mon Jul 11 02:36:00 2011
From: nharjee at snf.stanford.edu (nharjee at snf.stanford.edu)
Date: Mon, 11 Jul 2011 02:36:00 -0700
Subject: Problem yes SNF 2011-07-11 02:36:00: Not reaching pressure setpoint
Message-ID: <mailman.386.1356284100.5434.yes-pcs@snf.stanford.edu>

The past two times I've used the tool (07/06 and today), it has not reached the pressure setpoint at step 6. After each failed attempt, I re-positioned the door gasket and wiped it down with a clean wipe. The next time I ran it, the tool was able to reach the pressure setpoint. Perhaps the gasket is loose or the door lever is not applying enough pressure?



From vilanova at snf.stanford.edu  Mon Jul 11 08:38:03 2011
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mon, 11 Jul 2011 08:38:03 -0700
Subject: Problem yes SNF 2011-07-11 02:36:00: Not reaching pressure setpoint
Message-ID: <mailman.387.1356284100.5434.yes-pcs@snf.stanford.edu>

Refilled flask , Cleaned Chamber gasket, Inside/outside oven,
checked programs and cycled steps, everythign looks normal,
Ran Entire Program Cycle , Everything Fine , Ok to use. 



From zpatel at snf.stanford.edu  Wed Jul 20 11:51:23 2011
From: zpatel at snf.stanford.edu (zpatel at snf.stanford.edu)
Date: Wed, 20 Jul 2011 11:51:23 -0700
Subject: Shutdown yes SNF 2011-07-20 11:51:22: Cannot open the door 
Message-ID: <mailman.388.1356284100.5434.yes-pcs@snf.stanford.edu>

Wafer inside 
Do not know if they have gone through the complete prime cycle



From gsosa at snf.stanford.edu  Wed Jul 20 13:07:49 2011
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Wed, 20 Jul 2011 13:07:49 -0700
Subject: Shutdown yes SNF 2011-07-20 11:51:22: Cannot open the door 
Message-ID: <mailman.389.1356284100.5434.yes-pcs@snf.stanford.edu>

Checked process program- All OK.  Tested operation of tool- All OK



From mahnaz at snf.stanford.edu  Thu Jul 28 11:56:20 2011
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Thu, 28 Jul 2011 11:56:20 -0700
Subject: Shutdown yes SNF 2011-07-28 11:56:19: P-fail error 
Message-ID: <mailman.390.1356284100.5434.yes-pcs@snf.stanford.edu>

Not sure what it is.



From gsosa at snf.stanford.edu  Thu Jul 28 14:54:47 2011
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Thu, 28 Jul 2011 14:54:47 -0700
Subject: Shutdown yes SNF 2011-07-28 11:56:19: P-fail error 
Message-ID: <mailman.391.1356284100.5434.yes-pcs@snf.stanford.edu>

System lost program. Reprogrammed the controller and tested operation. All OK.