Shutdown yes SNF 2012-11-23 09:26:43: Can't reach vacuum

jrshakya at snf.stanford.edu jrshakya at snf.stanford.edu
Sun Dec 23 09:34:56 PST 2012


Another user had tried 3 times and couldn't reach vacuum. I tried several times (4-5 times), including wiping O-ring and seal-ring with IPA. The vacuum pump can't pump below 5 Torr. The system needs to reach below 1 Torr to proceed to HMDS pulse. 
Shutting down the oven so that other users don't waste time not knowing it is not working.



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