From mwiemer at snf.stanford.edu Thu Feb 3 09:55:55 2005 From: mwiemer at snf.stanford.edu (mwiemer at snf.stanford.edu) Date: Thu, 3 Feb 2005 09:55:55 -0800 Subject: Shutdown zygo SNF 2005-02-03 09:55:34: turbo problem Message-ID: I loaded a dummy, seasoned the chamber, then pressed "unload". The turbo made a loud noise and then sounded like it was spinning down. I cannot unload the dummy from the chuck. The lights on the turbo controller now say that it is levatating and accelerating, but I still cannot unload the dummy wafer. From uli at snf.stanford.edu Thu Feb 3 09:59:53 2005 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Thu, 3 Feb 2005 09:59:53 -0800 Subject: Shutdown zygo SNF 2005-02-03 09:55:34: turbo problem Message-ID: couldn't find a turbo, I think the Zygo is fine From weigao at snf.stanford.edu Sat Feb 12 01:11:02 2005 From: weigao at snf.stanford.edu (weigao at snf.stanford.edu) Date: Sat, 12 Feb 2005 01:11:02 -0800 Subject: Problem zygo SNF 2005-02-12 01:11:01: can not load software Message-ID: From tberg at snf.stanford.edu Mon Feb 14 06:53:38 2005 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 14 Feb 2005 06:53:38 -0800 Subject: Problem zygo SNF 2005-02-12 01:11:01: can not load software Message-ID: Reinstalled applications From jonroth at snf.stanford.edu Mon Feb 14 09:24:02 2005 From: jonroth at snf.stanford.edu (jonroth at snf.stanford.edu) Date: Mon, 14 Feb 2005 09:24:02 -0800 Subject: Shutdown zygo SNF 2005-02-14 09:24:01: z axis Message-ID: z axis not moving. From uli at snf.stanford.edu Mon Feb 14 10:24:58 2005 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Mon, 14 Feb 2005 10:24:58 -0800 Subject: Shutdown zygo SNF 2005-02-14 09:24:01: z axis Message-ID: I tested the system, ok to use