From lindaw at snf.stanford.edu  Thu Nov  4 13:24:12 2010
From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu)
Date: Thu, 4 Nov 2010 13:24:12 -0700
Subject: Comment zygo SNF 2010-11-04 13:24:12: seems to be working ok now
Message-ID: <mailman.139.1356284114.5449.zygo-pcs@snf.stanford.edu>

ran a test scan, and got the results(good, full scan) I used to get before it started acting weird this last month.  Whatever was recently tweaked works for my substrates now.  Thanks.



From mtang at snf.stanford.edu  Thu Nov  4 13:40:12 2010
From: mtang at snf.stanford.edu (mtang at snf.stanford.edu)
Date: Thu, 4 Nov 2010 13:40:12 -0700
Subject: Problem zygo SNF 2010-10-14 12:30:07: hardware error
Message-ID: <mailman.140.1356284114.5449.zygo-pcs@snf.stanford.edu>

Jim Haydon found one the pressurized bellows deflated.  This would result in stage vibration.  He refilled, so now the active table is balanced.  uli and lindaw tested and say it's working well now.