From kathryn.todd at sri.com  Wed Feb 13 16:06:58 2013
From: kathryn.todd at sri.com (kathryn.todd at sri.com)
Date: Wed, 13 Feb 2013 16:06:58 -0800 (PST)
Subject: [zygo-pcs] Problem zygo SNF 2013-02-13 16:06:57: hardware error
Message-ID: <19349549.74.1360800418156.JavaMail.coral@snc-coraldb.stanford.edu>

After some successful scans, a scan failed because of a "hardware error." The next scan I tried, the focus went out of alignment during the scan, and I got a "no valid points" error. The sample was in good focus with fringes before the scan, and afterwards it was far out of focus.

From uthumser at stanford.edu  Thu Feb 14 18:03:13 2013
From: uthumser at stanford.edu (uthumser at stanford.edu)
Date: Thu, 14 Feb 2013 18:03:13 -0800 (PST)
Subject: [zygo-pcs] Shutdown zygo SNF 2013-02-14 18:03:12: Could not get
 good measurement.
Message-ID: <7213927.102.1360893793180.JavaMail.coral@snc-coraldb.stanford.edu>

I measured 1.88 um step heigth instead of 1.83.

From uthumser at stanford.edu  Fri Feb 15 17:38:07 2013
From: uthumser at stanford.edu (uthumser at stanford.edu)
Date: Fri, 15 Feb 2013 17:38:07 -0800 (PST)
Subject: [zygo-pcs] Comment zygo SNF 2013-02-15 17:38:06: Tool needs
	calibration.
Message-ID: <541520.133.1360978687289.JavaMail.coral@snc-coraldb.stanford.edu>

I contacted the service for the Zygo. I post another comment as soo as I know more.

From uthumser at stanford.edu  Tue Feb 19 12:01:49 2013
From: uthumser at stanford.edu (uthumser at stanford.edu)
Date: Tue, 19 Feb 2013 12:01:49 -0800 (PST)
Subject: [zygo-pcs] Shutdown zygo SNF 2013-02-14 18:03:12: Could not get
 good measurement.
Message-ID: <22210909.167.1361304109490.JavaMail.coral@snc-coraldb.stanford.edu>

Calibrated the tool, ok to use again.

From uthumser at stanford.edu  Tue Feb 19 12:02:12 2013
From: uthumser at stanford.edu (uthumser at stanford.edu)
Date: Tue, 19 Feb 2013 12:02:12 -0800 (PST)
Subject: [zygo-pcs] Problem zygo SNF 2013-02-13 16:06:57: hardware error
Message-ID: <24731880.168.1361304132550.JavaMail.coral@snc-coraldb.stanford.edu>

 Calibrated.

From uthumser at stanford.edu  Tue Feb 19 12:02:24 2013
From: uthumser at stanford.edu (uthumser at stanford.edu)
Date: Tue, 19 Feb 2013 12:02:24 -0800 (PST)
Subject: [zygo-pcs] Comment zygo SNF 2013-02-15 17:38:06: Tool needs
	calibration.
Message-ID: <10045859.169.1361304144587.JavaMail.coral@snc-coraldb.stanford.edu>

Calibrated