[zygo-pcs] Problem zygo SNF 2013-02-13 16:06:57: hardware error

kathryn.todd at sri.com kathryn.todd at sri.com
Wed Feb 13 16:06:58 PST 2013


After some successful scans, a scan failed because of a "hardware error." The next scan I tried, the focus went out of alignment during the scan, and I got a "no valid points" error. The sample was in good focus with fringes before the scan, and afterwards it was far out of focus.


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