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Equipment Summary

A listing of all SNF, MOCVD, and ExFab equipment, its location, equipment group, and staff in charge.

Electron Beam Writers, Scanning Electron Microscopes, and Maskmaking

Badger
Lab Tab
- Sub Task
-
Tool
Equipment Name

Materials/
Equip Group
Process/
Training
Maintenance/
Repair
Location
Training Hrs/
Notes
n Sil
-Deposition
- hummer
Hummer V Sputter Coater
Cont Uli Gary / Ted SNF 1
raith Raith 150 Electron Beam Lithography System All TBA TBA SNF 12 (a)
n Sil
-Characterization
- sem4160
Hitachi 4160 Scanning Electron Microscope All TBA Ted SNF 3

 

Optical Photolithography: Resist Coat

Name Equipment Name Materials/
Equip Group
Process/
Training
Maintenance/
Repair
Location
Training Hrs/
Notes
headway2 Headway Manual Resist Spinner All Mahnaz Mario  / Gary SNF
1 (a)
laurell-R
Laurell Manual Resist Spinner All Mahnaz Mario  / Gary SNF 1 (a)
svgcoat / svgcoat2 SVG Resist Coat Tracks 1&2 All Uli / Mahnaz Gary  / Mario SNF 1.25 (a)
evgspraycoat
EVG 101 Resist Spray Coater
All
Mahnaz Gary  / Mario SNF 1.5 (a)

 

Optical Photolithography: Exposure

Name Equipment Name Materials/
Equip Group
Process/
Training
Maintenance/
Repair
Location
Training Hrs/
Notes
asml ASML PAS 5500/60 i-line Stepper All 1.Job Writing:
Mahnaz
2.Tool Training: Mahnaz
Gary  / Mario SNF
Job Writing: 2 Tool Training: 2 (a)
evalign EV Group Contact Aligner All Mahnaz Mario  / Gary SNF 1.5 (a)
karlsuss / karlsuss2 Karl Suss MA-6 Contact Aligner 1&2 All Uli/ Mahnaz Gary  / Mario SNF 1.5 (a)

 

Optical Photolithography: Develop

Name Equipment Name Materials/
Equip Group
Process/
Training
Maintenance/
Repair
Location
Training Hrs/
Notes
svgdev / svgdev2 SVG Resist Develop tracks 1&2 All Uli / Mahnaz Gary  / Mario SNF 0.5 (a)

 

Optical Photolithography: Ovens

Name Equipment Name Materials/
Equip Group
Process/
Training
Maintenance/
Repair
Location
Training Hrs/
Notes
bluem Blue M Programmable Oven Cont Mahnaz Mario / Gary SNF 0.5 (a)
oven110 110 C Oven All Uli Mario / Gary SNF (a)
oven90 90 C Oven All Uli Mario / Gary SNF (a)
ovensinge Singe Oven All Uli Mario / Gary SNF (a)
white-oven Mahnaz's Oven Cont Mahnaz Mario / Gary SNF
0.5 (a)
uvcure Ultraviolet Photoresist Cure All Mahnaz Mario / Gary SNF TBD (a)
yes YES Prime Oven All Uli / Mahnaz Mario / Gary SNF (a)

 

Chemical Vapor Deposition (CVD): Low Pressure

Name Equipment Name Materials/
Equip Group
Process/
Training
Maintenance/
Repair
Location
Training Hrs/
Notes
teos2 teos2 Clean Maurice Ted / Ray SNF 3 (b)
thermcolto Thermco LPCVD Low Temperature Oxide
Gold Maurice Ted / Ray SNF 3 (b)
thermoconitride1 Thermo LPCVD Nitride Clean Maurice Ted / Ray SNF 3 (b)
thermocopoly1 Thermco LPCVD Poly Clean Maurice Ted / Ray SNF 3 (b)
thermocopoly2 Thermco LPCVD Poly Gold Maurice Ted / Ray SNF 3 (b)
tylanbpsg
LPCVD BPSG Clean/ Semiclean Maurice Ted / Ray SNF 3 (b)
tylannitride LPCVD Nitride Clean Maurice Ted / Ray SNF 4 (or 2 w/tylanpoly)  (b)
tylansige LPCVD silicon Germanium Poly Clean Maurice Ted / Ray SNF 6 (b)
cvd-nanotube First Nano carbon nanotube CVD furnace Gold Xiaoqing/
Greg Pitner
Ted / Ray SNF 3
CVD-Graphene Aixtron Black Magic graphene CVD furnace Gold Xiaoqing/ Chris Neumann, Yong Cheol Shin, Ning Wang Ted / Ray SNF 3

 

Chemical Vapor Deposition (CVD): Plasma Enhanced

Name Equipment Name Materials/
Equip Group
Process/
Training
Maintenance/
Repair
Location
Training Hrs/
Notes
sts STS Plasma Enhanced CVD Cont Usha Jim SNF
2 X 1.25
hdpcvd PlasmaTherm Versaline HDP VCD System
All Usha/
Jim M
Elmer / Mike SNF 1.0
 ccp PlasmaTherm Shuttlecock PECVD System
All Usha/
Jim M
Elmer / Mike SNF 1.0

 

Chemical Vapor Deposition (CVD):  Atomic Layer

Name Equipment Name Materials/
Equip Group
Process
Maintenance/
Repair
Location
Training Hrs/
Notes
savannah Savannah Atomic Layer Deposition System Gold Michelle 
Jim SNF
3.0
See equipment page
 fiji1/fiji2 Fiji Atomic Layer Deposition - semi-clean chamber and gold chamber
Semi-Clean (Fiji1)
Gold (Fiji2)
Michelle Jim SNF 3.0
see equipment page
fiji3
Fiji Atomic Layer Deposition- gold chamber, dielectric dedicated
Gold Michelle Jim SNF covered in fiji1/2
mvd
Savannah/Plasma Cleaner in Glovebox System
Gold Michelle Jim SNF 3.0

 

Chemical Vapor Deposition (CVD):  Epitaxial

Name Equipment Name Materials/
Equip Group
Process/
Training
Maintenance/
Repair
Location
Training Hrs/
Notes
epi2 Applied Materials Centurion Epitaxial System Clean Maurice Elmer / Mike SNF
2x2
aix200 Aixtron MOCVD - III-V system Cont Xiaoqing/
Antony Jan
Ted / Ray/ Jim MOCVD 2x2+final
aix-ccs Aixtron MOCVD - III-N system Cont Xiaoqing/
Hongyun So
Ted / Ray/ Jim MOCVD 2x2+final

Metallization and Sputtering

Name Equipment Name Materials/
Equip Group
Process/
Training
Maintenance/
Repair
Location
Training Hrs/
Notes
innotec Innotec ES26C E-Gun Evaporator Cont Maurice Jim SNF
2 X 3
metalica Metallica Sputter System Cont Xiaoqing/ Ludwig Galambos Jim SNF
2 X 3hr
intlvac_sputter
IntlVac Nanochrome I Sputter System
Clean/ Semiclean Maurice Jim SNF
2 x 1
intlvac_evap IntlVac Nanochrome I Evaporator System
Clean/ Semiclean Mahnaz Jim SNF 2

lesker-sputter Exfab 155A:
Lesker Sputter

Cont Maurice Carsen EXFab 155A
1
aja-evap Exfab 155A:
AJA Evaporator

Cont Xiaoqing Carsen EXFAB 155A
TBD

 

Dry Etching

Badger
Lab Tab
- Sub Task
Tool
Equipment Name Materials/
Equip Group
Process/
Training
Maintenance/
Repair
Location
Training Hrs/
Notes
SNF-Dry Etching amtetcher AMT Oxide Plasma Etcher Clean / Semiclean Usha Elmer / Mike SNF
1
SNF-Dry Etching drytek2 Drytek 100 Plasma Etcher All Usha Elmer / Mike SNF 1 (c)
SNF-Dry Etching drytek4 Drytek 100 Plasma Etcher Cont Usha Elmer / Mike SNF 1 (c)
SNF-Dry Etching gasonics Gasonics Aura Asher Clean / Semiclean see equipment page Elmer / Mike SNF
SNF-Dry Etching lampoly Lam Research TCP 9400 Poly Etcher Clean Usha Elmer / Mike SNF 1
SNF-Dry Etching matrix Matrix Plasma Resist Strip Cont Usha / Uli Elmer / Mike SNF 0.5
SNF-Dry Etching mrc MRC Reactive Ion Etcher Cont Usha Elmer / Mike SNF 1.5
SNF-Dry Etching p5000etch Applied Materials P5000 Etcher Semiclean Usha Elmer / Mike SNF 1.5
SNF-Dry Etching
PT-DSE
Plasma Therm Versaline LL ICP Deep Silicon Etcher
Cont Usha

Elmer / Mike
SNF 1.5
SNF-Dry Etching
PT-MTL
Plasma Therm Versaline LL ICP Metal Etcher
Cont Usha
Elmer / Mike
SNF 1
SNF-Dry Etching 
PT-Ox
Plasma Therm Versaline LL ICP Dielectric Etcher
Cont Usha Elmer / Mike SNF 1
SNF-Dry Etching pquest Plasma Quest ECR Etcher Cont Usha Elmer / Mike SNF 1
SNF-Dry Etching
Ox-35
Oxford III-V etcher
Cont see equipment page Elmer / Mike SNF 1.5
SNF-Dry Etching
oxford-rie
Oxford Dielectric Etcher Cont Usha Elmer SNF 1
SNF-Dry Etching stsetch STS Deep RIE Etcher Clean Usha Elmer / Mike SNF 1
SNF-Dry Etching
uetch
SPTS uetch vapor etch
All Uli Jim  / Mike SNF 0.5
SNF-Dry Etching xactix Xactix Xenon Difluoride Etcher Clean / Semiclean /Cont Uli Elmer / Mike SNF 0.5
nSiL- Other
plasma-etch
Plasmaetch PE-50 Cont Sage Carsen SNF
Room 155
0.5
SNSF-FCR
Ion Mill
Intlvac Ion Mill Etcher Cont Cliff Cliff SNSF/ Spilker
Flexible Cleanroom
SNSF-NPCR
RIE: Oxford
PlasmaPro 80
Oxford PlasmaPro 80 - Reactive Ion etcher Cont Usha Cliff SNSF/ Spilker
Nanopatterning
Cleanroom
1

 

Annealing, Oxidation, and Doping

Name Equipment Name Materials/
Equip Group
Process/
Training
Maintenance/
Repair
Location
Training Hrs/
Notes
thermco1-3 Thermco Oxidation Furnace
Clean Maurice Ted / Ray SNF
1 (b)
thermco4 Thermco Oxidation Furnace Cont Maurice Ted / Ray SNF 1
tylan9 Forming gas Anneal Furnace Cont Maurice Ted / Ray SNF 1
tylan6 Phos Predep Furnace (POCl3) Clean Maurice Ted / Ray SNF (b)(d)
tylanfga Forming gas Anneal Furnace Semiclean Maurice Ted / Ray SNF 3 (b)(d)

 

 

Rapid Thermal Annealing

Name Equipment Name Materials/
Equip Group
Process/
Training
Maintenance/
Repair
Location
Training Hrs/
Notes
aw610-l AllWin 610 Rapid Thermal Annealer Clean/Semi-clean
Maurice Elmer / Mike SNF
1
aw610-r AllWin 610 Rapid Thermal Annealer Cont Maurice Elmer / Mike SNF
1

 

Wetbenches

Name Equipment Name Materials/
Equip Group
Process/
Training
Maintenance/
Repair
Location
Training Hrs/
Notes
cpd Critical Point Dryer Cont Uli / Maurice Jim / Mike SNF
2
lithosolv Lithography Solvent Bench All Uli / Mahnaz Mario SNF (a)

Mask Scrubber N/A Mahnaz Mario SNF
wbclean-1 and 2 (former wbdiff)
Clean-1 and 2 Wetbench
Clean Uli Jim / Gary SNF 2.25
wbebeam Ebeam Process Wetbench All TBA Gary  / Mario SNF NA
wbflexcorr-1 and-2 (former wbgaas)
Flexible Corrosive Wetbench and GaAs
All and GaAs
Uli / Mary Jim / Gary SNF 2.25
wbflexcorr-3 and 4 (former wbgen)
Flexible Corrosive Wetbench All (no GaAs)
Uli / Mary Jim / Gary SNF 2.25
wbgen2-hp / wbgen2-rfx Germanium wbgen-2 Clean Ge Mary
Jim / Gary SNF wbclean-1 and 2 required
wbmetal Metal Wetbench Semiclean Uli Jim / Gary SNF .75
wbmiscres Miscellaneous Photoresist Wetbench All
Mahnaz / Uli Mario / Gary SNF (a)
wbnonmetal Non-Metal Wetbench Clean Uli Jim / Gary SNF covered in wbclean-1 and2
wbdecon/clean-3 (former wbsilicide)
Decon and Clean-3 Wetbench
Clean Uli Jim / Gary SNF wbclean-1 and 2 required
wbflexsolv Solvent Wetbench All
Uli / Mary Jim / Gary  / Mario SNF .5

 

Wafer Bonding, Sawing, and Polishing

Name Equipment Name Materials/
Equip Group
Process/
Training
Maintenance/
Repair
Location
Training Hrs/
Notes
cmp GnP Poli-400L
Hardware for both contaminated and clean Michelle Gary Yama Jim H. room 159
1.5
evbond EV Group Wafer Bonder Cont Mahnaz/Mary Mario / Gary SNF
4
ksbonder Karl Suss Wafer Bonder Clean Mahnaz Mario / Gary SNF 1
DISCO wafersaw DISCO Wafer Saw
Cont Usha/ Mary Elmer/ Gary/ Ted room 159
1.5

 

Characterization and Testing

Name Equipment Name Materials/
Equip Group
Process/
Training
Maintenance/
Repair
Location
Training Hrs/
Notes
nSil
-Characterization
 - afm2
Digital Instruments Nanoscope 3000 AFM All TBA Mario / Gary SNF
AFM-nsil required 3
nSil
-Characterization
 - alphastep
Alphastep 500 Profilometer Cont Uli Mario / Gary SNF .25
nanospec / nanospec2 Nanospec Film Thickness Measurement System All Uli Gary / Mario SNF .25
prometrix Prometrix Resistivity Mapping System All Uli / Maurice Gary / Mario SNF .5
p2 Tencor P2 Profilometer Semiclean/
Clean
Uli Gary / Mario SNF .5
nSil
-Characterization
 - s-neox
Sensofar S-neox, non contact 3D optical profiling
All Uli Gary / Mario SNF 1
stresstest Flexus 2320 All Uli Gary SNF .75
woollam J.A. Woollam M2000 Spectroscopic Ellipsometer All Michelle Gary SNF 2
micromanipulator6000   micromanipulator6000 IV-CV probe station All Xiaoqing Jim SNF 0.5

 

 

 

 

 

 

 

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