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Beam Tools

Equipment pages for Stanford Nanofabrication Facilities Electron Beam Technology Group.

Hummer V Sputter Coater: hummer

The Technics Hummer V is a manually controlled table top sputter system used for depositing a conductive coating for visualizing SEM samples. The sputter deposition process is typically more uniform and reproducible, and yields more adherent films with finer grains than in comparable evaporation systems. Currently we have installed a new Palladium (Pd) Target into this system which will deposit very fine grained thin film coatings that are not easily resolved in the Hitachi SEM's. Can also be employed for excellent reduction of sample surface charging on insulating substrates for Electron Beam Lithography. This is not a thick film sputter coater and should not be employed for depositions greater than 1000 Angstroms.

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Raith 150 Ebeam Writer: RAITH

link to google docs: https://docs.google.com/document/d/e/2PACX-1vRUcNZ4Xfau0a58Vd3U96wM1NRSx9hTEiJDOVDZOzUV-p2KoQeXjIhe-u2Y9QOT4Idj3Iix-XCIVe85/pub

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