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Characterization & Testing Summary

In-Process Characterization Equipment Overview, doc

 

Equipment Name
Use
Wafer Size
Materials/Equip Group
Comments
AFM2
Step Profile
Pieces to 4 inch
All

Manual Film Thickness Measurement
Pieces to 6 inch
All
Single or dual layer transparent films, >300Å
Manual Film Thickness Measurement
Pieces to 6 inch
All
Single or dual layer transparent films, >300Å
Sheet Resistance Measurements
2 to 8 inch
Probe head for each equipment group

Flexus 2320
Film Stress Measurements
3 to 8 inch
All
 

 Sensofar S-neox non contact 3D optical profiling  Pieces to 8 inch  All  
Step Profile
Pieces to 6 inch
Semi Clean/Clean
500Å to 80µm
Step Profile
Pieces to 6 inch
Cont
500Å to 300µm
Film thickness and refractive index
Pieces to 6 inch
All
Multilayer transparent films, >10Å
 Microscope

     All  

 

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