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Characterization & Testing Summary

In-Process Characterization Equipment Overview

 

Equipment Name
Use
Wafer Size
Materials/Equip Group
Comments
Step Profile
Pieces to 4 inch

non contact optical 3D Profiler with thin & thick film measurement capability
Pieces to 8 inch
 
Manual Film Thickness Measurement
Pieces to 6 inch
Single or dual layer transparent films, >300Å
Manual Film Thickness Measurement
Pieces to 6 inch
Single or dual layer transparent films, >300Å
Sheet Resistance Measurements
2 to 8 inch

Flexus 2320
Film Stress Measurements
3 to 8 inch
All
 

Step Profile
Pieces to 6 inch
500Å to 80µm
Step Profile
Pieces to 6 inch
500Å to 300µm
Film thickness and refractive index
Pieces to 6 inch
Multilayer transparent films, >10Å
Zygo
White Light 3D Surface Profiler
Pieces to 6 inch
 


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