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micromanipulator6000

micromanipulator6000 is a four-probe electrical test station. With a Keysight B1500A Semiconductor Device Analyzer, it is capable of both I-V and C-V measurements.

Picture and Location

 

Micromanipulator6000 is composed of a 4-probe probe station (left) and a Keysight B1500A Semiconductor Device Parameter Analyzer (right).

probe station  B1500A analyzer

The tool is located at room 151 of Exfab.

Background

 
The tool was upgraded in 2011 with a PC-based, easy-to-use Agilent B1500A Semiconductor Device Parameter Analyzer, to replace the aged HP 4145B setup. Recently in 2016, it was further upgraded to accommodate CV measurement by adding a CV module, the B1520A Multi frequency Capacitance Measurement Unit (MFCMU). The combination of MFCMU and Source/Measure Units (SMUs) makes B1500A complete IV and CV measurement solution from basic IV to various capacitance measurements such as CV, capacitance versus time (C-t), capacitance versus frequency (C-f) and Quasi-Static CV (QS-CV) in a box. Along with analysis and data management capability of the EasyEXPERT software, it is very powerful and useful to perform IV and CV characterizations for a wide range of devices such as semiconductor, carbon nanotube (CNT), carbon nanowire (CNW), active/passive component, material and any electric devices that require accurate and precise IV and CV measurement.
 
In addition, we added an N1301A SMU CMU unify unit (SCUU) which enabled easy and fast switch between CV and IV measurement without sacrificing measurement accuracy. Besides taking care of switching and accuracy issues the B1500A and SCUU combination also solves CV measurement compensation, connection and return path issues. Along with the SCUU, we also added a guard switch unit (GSWU) which is used to short the guard of the measurement cable while CV measurements are performed. The GSWU switch opens automatically during IV measurements to prevent potential SMU damage, since otherwise the guards of the  two SMUs (which are presumably at
different potentials) would be shorted together. The connections to GSWU and SCUU are shown below:

Guard switch unit connection SCUU

For more details about the B1500A, please refer to Keysight: 
http://www.keysight.com/en/pd-2253443-pn-B1500A-A20/multi-frequency-capacitance-measurement-unit-mfcmu?nid=-33019.1048179.00&cc=US&lc=eng 

Process Capabilities

Cleanliness Standard

The micromanipulator6000 test station appears in all three equipment groups (clean, semiclean, and gold).  

Performance of the Tool

What the Tool CAN do

  •  Easy and fast yet accurate IV and CV measurements by automated connection change by the SCUU: SMU3 and SMU4 are switched between IV and CV measurement modes automatically by SCUU, while SMU1 and SMU2 can be used for IV measurement only 

  •  IV measurement resolution 30 pA with SMU3 and SMU4 (100 pA with SMU1 and SMU2), CV measurement resolution 0.3 pF

  • 100 V DC bias due to the addition of SCUU; Up to 250 mVrms signal level; CV measurement in multi frequency from 1 kHz to 5 MHz with minimum 1 mHz frequency resolution

  •     

What the Tool CANNOT do

  •  The tool currently does not have pulsed IV and ultra-fast IV measurement capability. It is possible to upgrade it to accomodate more functions though.

  

Contact List and How to Become a User

Contact List

The following people make up the Tool Quality Circle:

  • Process Staff: Xiaoqing Xu <steelxu@stanford.edu>
  • Maintenance: Jim Haydon <jhaydon@stanford.edu>
  • Super-Users: Lisa Rozario <lisarozario@yahoo.com>

 

Training to Become a Tool User

 

To get qualified on micromanipulator, please shadow an existing user for at least one session, and ask as many questions as possible. Then contact the process staff for final qualification.

Operating Procedures

 

Please attend a shadow session with one of the exhisting users or contact the process staff for operating details. 

Process Monitoring and Machine Qualification

Qual Process Overview

 

 

 

Procedure

 

Reported Data

 

Qualification Results

 

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