Skip to content. | Skip to navigation

Personal tools


The CCI HD is a high resolution optical 3D Profiler with a film thickness measurement capability. It uses a novel technique, “Coherence Corelation Interferometry” for high accuracy surface topography measurement (stepheight, surface finish etc.) and is suitable for a broad range of surface types, rough, smooth, steep, dull etc.

Picture and Location


The tool is located at AB3 on the Lab Map.


The CCI HD is a type of scanning white-light interferometer. This is an instrument in which the difference in length between a reference beam of light and a sample beam shone on a sample cause bright and dark lines (fringes). Incoming light is split inside the CCI, one beam going to an internal reference surface and the other to your sample. After reflection the two light beams recombine inside the CCI, undergoing constructive and destructive interference and producing light and dark fringe pattern. The Coherence Correlation Interferometry (CCI) algorithm is used to calculate surface topography from this fringe pattern.

Results from the CCI algorithm have the same or better precision as Phase Shifting Interferometry (PSI), but the technique avoids measurement errors that occur with 150nm+ steps, slopes and samples that are tens of microns order in height. It is highly resistant to environmental noise, making it effective for very smooth samples and conversely very rough and steep samples where CCI light reflected from the surface is very diffuse.

The same CCI algorithm is used for all measurements making it suited to complex surfaces and tribology applications.

Please find more detailed in formation about the CCI HD system on the Taylor-Hobson (part of Ametek) company web site:

If you have more questions, please contact:

Jeff Brown, Western US Applications and Sales Manager,

Dr. Mike Conroy, Business Development Manager,

Jamie Ross, Non Contact Business Development Manager,


Process Capabilities

Cleanliness Standard

 This tool appears in all three equipment groups (clean, semiclean, and gold).

Performance of the Tool

What the Tool CAN do


Advanced optical interferometry

Step height and roughness measurements on reflective material

Vertical resolution: 0.01nm for all objectives

Finest lateral resolution: 0.4um with the 50X objective (optical resolution limit)

2.2 mm vertical range for single scans, 20mm for multiple scans

4 mega pixel camera

Green LED light for all opaque surfaces

White Halogen lamp for semi-transparent films and resist measurements

3 objective lenses:

·         5x:       3.1um lateral resolution,          3.3 x 3.3mm field of view

·         10x:     1.3um lateral resolution,          1.65 x 1.65mm field of view

·         50 x :   0.4-0.6 um lateral resolution, 0.33 x 0.33mm field of view

<1.5um “Thin film” measurement using white light:
Valid for single film layers on a substrate only. Average film thicknesses are calculated over a user defined area or areas. Up to 9 areas are selectable per scan:

(image missing)

·         Minimum spot size 1.7 um2

·         Maximum spot size 1.65mm2

Film thicknesses between 50nm and 5um.  10x objectives only, n and k between 400 and 800 wavelength is required.

Thick film measurement from 1.5um up to 20um.
Up to 4 layers of film measurable on each substrate. All film thickness must be larger than 1.5um. The CCI produces a 3D topography map of the top surface of each layer.


What the Tool CANNOT do

Measure film thickness < 50nm.

Measure stacked, multiple film layers with thicknesses less than 1.5um each

Can not measure n or k.


How to Become a User


  1. Read all material on the SNF website concerning the CCI HD.
  2. Contact SNF training contact on the Equipment Summary page.



Operating Procedures


Don't damage objectives!


Make reservations.

Enable CCI HD

Turn on both monitors.

Switch on green or white light.

Step Height measurement


On the right monitor, start the Talysurf CCI software.

If login window opens up, log in as Standard User (no password is required).

If following window opens up:

"Ensure correct hardware (objective) is selected: lens ....," click OK.

CCI HD program

Select appropriate objective (5, 10, or 50x) by rotating turret - careful not to touch objectives.

It is recommended to start with 10x, if needed rotate to 50x.

Before placing sample on stage make sure objective is high enough.

CCI HD stage

If objective head is not high enough, rotate joystick to the right to move objective up.

CCI HD joystick

To move stage, turn joystick right, left, back or forward, for faster movement, press and hold either one of the two buttons on top of the joystick.

Place sample on center of stage, don't damage objective and don't scratch or contaminate stage, place sample on wipe.

Ensure stage is nominally level (by eye).

Lens and program setup

Click on Configuration tab:

CCI HD joystick


- Ensure proper lens is selected.
If you change the lens, a window opens up: "Ensure correct hardware (objective) is selected: lens ....," click OK

Mode – select desired camera mode – default is XY mode.

– default is x1

Optimise Resolution

- left


Set up Configuration Settings, click on left icon, which opens the Scanning window: CCI HD Scanning setup


Light: Green LED, for standard reflective surfaces

          Day Light, for non-reflective surfaces


Layers: default is Single Surface

Reflectance: default is General



Choose appropriate surface type, open Surface tab:


CCI HD Surface window


Default settings for Surface are:

Surface height mode: Smooth surfaces (phase) (refer to help for more info)

Leveling: None
Threshold filter option: None
Missing Points: unchecked

Open Options tab:

CCI HD Options window

Default settings for Options are:
Crosshair Position: X:  50 %
                             Y:  50 %
Acquisition Options: check Repeat on missing frames
Display Options: un-ckeck Quick scan display
Light Control Options: check Compensate for Hardware

To close window, click on the green "check" icon, bottom right corner of window.


To set the light automatically, open Fringe Setup tab:

CCI HD Fringe tab

click on "Light Level Control" icon

CCI HD Light Level Control icon

It is recommended to set the light to 50%.

The Light Level Control window opens up, under Automation, click on left icon “Set Light Level to target”.


CCI HD Light Level Control 50 %

 note: no yellow, as it indicates saturation

To close window, click on red cross in upper right corner.


Set Z-stop

In Axis Control, click on OK if following window pops up:

CCI HD axis control, ok

In the red 'Z Bottom End Stop' field, click on the left icon : "Clear Z Bottom End Stop", it will clear the Z stop set by the previous user:

CCI HD Axis Control window


Click on OK:

CCI HD Z stop OK

Find surface:
Move the joystick to the right or left to move the stage in x or y direction, to move it faster, press and hold one of the buttons on top of the joystick. To move the objective head up or down, carefully twist the handle to move in Z, the direction is pictured on the joystick.
Raise objective up or down to focus on surface. Tip: it might be easier to focus on an edge if possible. Record the working distance, which is displayed in the bottom left hand corner of the screen.
Move the lens until it is closer to the sample than the specified working distance for the selected lens and in the red 'Z Bottom End Stop' field, click on the center icon:
"Set Z Bottom End Stop to Current Z Position":

CCI HD Z stop current

The Z stop is set, the Z field should be red; you can't lower the objective below the Z stop.

CCI HD Z stop

 Find the surface of your sample again, move the stage back up to the working distance you've recorded.


Open Measurement tab.

CCI HD measurement tab

Default settings are:

Auto increment

Save surface data

Auto run TalyMap


Flatten sample and find Fringes

- Automatic
    1. Surface find tab in Fringe Setup – click on “AutoFringe Find and Auto Range
    2. Note: there are 3 icons with different search ranges
    3. Hit green go button – note: must be relatively close to focus position

- Manually

To adjust the tip/tilt of the stage, rotate front knob on CCI unit such that fringes get larger and are oriented vertically on the screen – if necessary, adjust focus with joystick to keep fringes in focus.

CCI HD front knob

Rotate side knob on CCI such that fringes get larger and are oriented horizontal – again, focusing may be necessary. Tip or tilt the stage until there are less than 2-3 fringes.

Note: depending on nature of surface and roughness, the fringes may appear specular instead of bands.

    CCI HD fringes



    Set measurement range

    - Automatic

    Surface find tab in Fringe Setup – click on “AutoFringe Find and Auto Range”.

      - Manually

      In Fringe Setup, click with Move Up button above the surface (note: don't use the joystick!):

      CCI HD Move Up

      and confirm with clicking on the Set Top button:

      CCI HD Set Top

      Click with "Move Down" button below surface (note: don't use the joystick!):

      CCI HD Move Down

      and confirm with "Set Bottom":

      CCI HD Set Bottom



      In Fringe Setup, Click on the green "Measure" button; note: you might have to set the light to 50% again:

      CCI HD Measure

       After the measurement, the measurement program 'TalyMap' opens up on the left monitor:

      CCI HD Taly Map


      Step height measurement using TalyMap:

      In Operators, click on "Profile extraction..."

      CCI HD profile extraction

      Under 'Extraction type', select for example 'Oblique', drag the line where you would like measure steps and click on OK:

      CCI HD step height line


      CCI HD step

      If necessary, level using the program:

      Click in 'Operators' on 'Leveling...'

      CCI HD level

      Under 'Leveling Method', select for example '2 bars', click on and drag the bars where the sample should be leveled:

      CCI HD level02


      CCI HD level03

      Under 'Studies", select 'Set Height Measurement'

      CCI HD step height

      You'll get max and mean depth:

      CCI HD step02

       Under studies, click on "Distance Measurement"

      (insert image)

      The two cursors can be moved separately.

      50x objective

      If you previously focused on the surface using the 10x objective, you can rotate the objective to the 50x, the working distance will be automatically 3.4 mm. Note: you can't rotate to the 5x, you have to move the objective head up first!

      In 'Configuration', select the 50x lens

      CCI HD 50x


      working distance is now 3.4 mm

      CCI HD 50x02

       Set the measurement light to 50% before you click on measure. You might have to adjust the fringes or the scan range.



      5x objective

      Before you use the 5x objective, move the objective head up, don't damage the objectives!

      In 'Configuration', select the 5x lens

      CCI HD 5x


      working distance is now 9.3 mm:

      CCI HD 5x02

       Set the measurement light to 50% before you click on measure. You might have to adjust the fringes or the scan range.

       Roughness Measurement

      Profile extraction of a flat region.

      Level sample.

      Profile extraction: select specific region for surface roughness calculation (circular or line profiles will give roughness along the lines).

      Select "Filtering" from left menu and choose a cut-off value that best represents the amount of measurement noise you want to take out of the profile. 2.5um or 8um may be best for more accurate roughness measurements (assuming the roughness is small), click ok.

      Select "Default MiniDocs profile" to get roughness statistics.
      Ra = roughness average
      Rg = root square roughness
      Rt = maximum roughness


      Measurement tips from labmembers:

      Sample SrTiO3, compressed powder and sintered, rough surface, low reflectance

      Under Fringe setup, check "gradient enhancement" in the "Image" box. This will enhance the live image contrast and makes it easier to find features on your sample.

      In the configuration settings, select single surface, green light, low reflectance 3, and rough surface in surface settings.



      Copy files onto USB drive

      Under 'File', select 'Print':

      CCI HD save

      Select 'PDF complete' and click on OK:

      CCI HD save02


      Save document in your own folder on computer

      Create your own folder, note: don't leave your files for too long on the computer!

      Under 'File', select 'Save the document':

      CCI HD save02

      Questions? Open the help menu:

       CCI HD Help



      Move objective head up, move stage forward, and carefully remove sample from stage, don't damage objectives!

      Default objective is 10x.

      Close programs.

      Switch off both monitors.

      Switch off white light, you can leave green light on.

      Clean up.

      Disable CCI HD.


      Document Actions