Applied Materials Precision 5000 Etcher, p5000etch (semi-clean)
The Applied Materials Precision 5000 Etcher is a "cluster" tool, consisting of four, independently-controlled etch chamber modules which surround a central loadlock. Chambers A, B, and C are Magnetically-Enhanced Reactive Ion Etch (MERIE) systems, each equipped with optical endpoint detection to allow for more customized etching. The chamber configuration and system software allow control over a wide range of process parameters.
Quick starts are handy references of the Operating Instructions. They can be helpful for reminding the user on how to use the tool. Labmembers should have read and understood the full Operating Instructions.
Recent qualifications for all three chambers are given for quick reference.