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Plasmatherm Etchers (pt-dse, pt-ox and pt-mtl)

SNF has three Plasma Therm dry etchers for deep Si etching (pt-dse), metal etching (pt-mtl) and dielectric etching (pt-ox). The operating software is common to the three etchers and a software description is located in this folder. You will also find the available default process steps and parameter limits for each tool. Individual folders for the etchers are located in this folder as well.

Plasma Therm Etchers - General Operating Procedure

Inductively Coupled Plasma Etchers with Versaline Software - Metal, Oxide and Deep Silicon Etchers

Plasma Therm Etchers - General Operating Procedure - Read More…

PlasmaTherm Metal Etcher (pt-mtl)

The Versaline LL-ICP Metal Etcher was acquired in late 2011 for precision metal etching on a flexible range of substrate types. It complements P5000 Metal Etcher as it can handle more materials and belongs to the "Contaminated" group of equipment. PT-MTL can be configured to etch either 4" or 6" wafers and the default configuration is 4".

PlasmaTherm Metal Etcher (pt-mtl) - Read More…

PlasmaTherm Oxide Etcher (pt-ox)

The Versaline LL-ICP Oxide Etcher was acquired in late 2011 for precision silicon oxide and deep glass/quartz etching.

PlasmaTherm Oxide Etcher (pt-ox) - Read More…

PlasmaTherm Deep Silicon Etcher (pt-dse)

The Versaline LL-DSE Deep Silicon Etcher was acquired in late 2011 for DRIE silicon etching on substrates containing non-MOS materials.

PlasmaTherm Deep Silicon Etcher (pt-dse) - Read More…

PlasmaTherm - Creating/ Editing Recipes

Procedure to create, edit and modify recipes for PT-MTL, PT-OX, PT-DSE and hdpcvd. In order to minimize recipe errors and better maintain equipment health, recipes need to go through an approval process before creation & use. Please consult responsible staff for approval.

PlasmaTherm - Creating/ Editing Recipes - Read More…

Processing Transparent Substrates in the VersaLine Systems

The PlasmaTherm VersaLine systems rely on a wafer sensor in the load lock that makes processing transparent wafers particularly challenging. Here is a procedure to safely work around the sensor.

Processing Transparent Substrates in the VersaLine Systems - Read More…

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