Skip to content. | Skip to navigation

Personal tools
You are here: Home / Equipment / Optical Photolithography Overview / Develop Summary / SVG Developer

SVG Developer

SVG Develop Tracks, svgdev/svgdev2

The SVG (Silicon Valley Group) developer is an automated system with two independent tracks (svgdev and svgdev2) for developing and post-baking exposed photoresist-coated 4" wafers. Each track system includes two stations: a spin station which dispenses and rinses away developer; and an oven station for post-bake.

SVG Develop Tracks, svgdev/svgdev2 - Read More…

Document Actions