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SVG Coat Tracks 1&2

SVG Coat Tracks, svgcoat/svgcoat2 new

The SVG (Silicon Valley Group) coater is an automated track system for dispensing photoresist on 4" silicon, glass, or quartz wafers. The system includes two stations: a prime oven which bakes the wafer and dispenses the adhesion promoter, HMDS; and a combination spinner, which dispenses photoresist, and pre-bake oven which cures the resist. HMDS is only available at track 2. The uniformity of spun photoresists are typically +/- 100 Å. Features: * Two automated, single-wafer track systems. * Dispenses any of four different positive photoresists. * Selectable programs at the spinner and each of the bake ovens. * "Manual" dispense program allows the user to dispense other approved photoresists, on track 1 only

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