49 point wafer mapping
The attached Matlab script visualizes the results of 49 point scans by mapping their location and creating a linear interpolation grid over a 4 inch wafer. Copy the 49 data points from your scan and enter them into the z vector at the top of the Matlab file in the order that they are output by Prometrix. The output image is saved to a PDF named "Prometrix.pdf" in the working directory defined at the top of the script.
An example output is shown below.