Skip to content. | Skip to navigation

Sections
Personal tools
You are here: Home / Equipment / Characterization & Testing Summary / Prometrix / Matlab File: 49 point wafer mapping

Matlab File: 49 point wafer mapping

Objective-C source code icon resistivity_v3.m — Objective-C source code, 1 kB (1991 bytes)

File contents

%% Tim English, englisht@stanford.edu
% This files plots Prometrix wafer maps with 49 points and creates a pdf
% of the figure. Wafer flat is at the bottom of the output image

close all
clear all

% Set the directory where you'd like the output PDF to be created
dir = 'C:\Users\username\Desktop\'

%% Update this z vector with the resistivity values from your scan
% in the order printed out by Prometrix
z=[46.58
47.50
45.30
45.49
45.55
45.55
45.48
47.91
48.39
49.41
47.85
46.92
45.84
44.88
44.35
44.48
44.28
44.81
45.55
47.05
48.51
50.09
51.05
51.34
50.45
52.57
50.93
49.41
47.31
45.88
45.09
44.48
44.07
43.33
43.47
43.14
43.75
43.58
44.14
45.09
45.83
48.83
51.35
52.92
54.43
54.91
54.57
54.49
53.83];



theta=[0
0
45
90
135
180
225
270
315
0
22.5
45
67.5
90
112.5
135
157.5
180
202.5
225
247.5
270
292.5
315
337.5
0
15
30
45
60
75
90
105
120
135
150
165
180
195
210
225
240
255
270
285
300
315
330
345];

r=[0
1
1
1
1
1
1
1
1
2
2
2
2
2
2
2
2
2
2
2
2
2
2
2
2
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3];

r=r.*33.*.5;
theta=theta.*(pi/180)+pi/2;
[x,y,zz] = pol2cart(theta,r,z);

ft = 'linearinterp';
opts = fitoptions( ft );
opts.Normalize = 'off';
[fitresult, gof] = fit( [x, y], zz, ft, opts  );


% Plot fit with data.
figure( 'Name', 'Wafer Map' );
h = plot( fitresult );
hold on
title( 'Sheet Resistance Map  \Omega/sq','fontsize',16)
xlabel( 'X (mm)','fontsize',16 );
ylabel( 'Y (mm)' ,'fontsize',16);
zlabel( 'sq','fontsize',16 );
set(gca, ...
  'Box'				, 'on'			, ...
  'FontSize'        ,  16          );
set(gca,'LineWidth',1)
set(gca,'GridLineStyle','--')
  set(gca,'XTick',[-50:25:50])
  set(gca,'XTickLabel',['-50';'-25';' 0 ';' 25';' 50'])
    set(gca,'YTick',[-50:25:50])
  set(gca,'YTickLabel',['-50';'-25';' 0 ';' 25';' 50'])
axis([-50 50 -50 50])
grid off
daspect([1,1,1])
alpha(1)
view( 0, 90 );
cb = colorbar;
caxis([min(z(:)), max(z(:))])
hold off

%You can change the name and formatting of the pdf file here
print('-r600','-dpdf',[ dir  'Prometrix.pdf'])


Document Actions