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Tencor P2, p2

The Tencor P2 Long Scan Profiler is a computerized, high-sensitive surface profiler that measures step height and roughness in a variety of applications.

Picture

 

 P2

This tool is located at AB3 on the Lab Map:

 

Process Capabilities

Cleanliness Standard

The Tencor P2 is operated in the CLEAN and SEMICLEAN EQUIPMENT GROUPS.

 

Performance of the Tencor P2

  • Pieces to 8 inch wafers.
  • Stepheight 500 Å to 80µm
  • Scan length 0.01 mm to 210 mm.
  • Stylus Radius 12.5 µm

 

How to Become a User

 

 

  1. Read all material on the SNF website concerning the Tencor P2.
  2. Contact SNF training contact on the Equipment Summary page.

Operating Procedures

 

 Tencor P2 Overview

 

TencorP2Overview 

     

Tencor P-2 Long Scan Profiler

 P2 Measurement Area




 

      Measurement Area of the Tencor P-2 Profiler

 

Auxiliary Panel

P2 auxiliary panel

 

      Auxiliary Panel

 

 

 

 

 

 

 

Key                             Action

 

POWER Button          Turns system power on or off.

KEYLOCK                   Provides 3 different levels of operator authority.

RESET Button            Restarts the computer without turning instrument off.

 
Built-in Keyboard

 

P2 remote keyboard

      Built-in Keyboard

 

Key                             Action

 

UNDO             Used in data entry to backspace from the end of a character string erasing one character at a time.                        

Reverses zoomed or leveled trace to previous trace when combined with Zoomed or Leveled key.

DISPLAY         Alphanumeric window when saving data.

CLEAR/NO     Deletes and entire data field.

ENTER/YES   Selects menu item form pull-down menu.

Completes the entry of any new value or ID.

HELP               Displays help screens for each screen directly accessible form the menu bar.

MENU              Displays pull-down menu. When pressed again, clears pull-down menu

Returns to data screen form Motion screen and displays pull-down menu.

SEL                 Toggles between left and right cursor.

SEL pressed twice in quick succession actives both cursors that then move in tandem.

[up arrow]   and SEL   toggles elevator speed to high

[ ¯ ] [ ­ ]           Lowers and Raises the head in Zq mode.

When tapped quickly, [ ­ ] raises the stylus without raising the head. Activates Delta Average mode cursor operation.

In Motion screen zoom, changes the magnification of the sample image. Selects previous of next field in a pop-up window.

[¬] [® ]          Moves stage in X-Y direction in XY mode.

Rotates stage in Zq mode with Motorized Rotary Stage Option.

Moves Measurement and leveling cursors in Data screen.

Selects previous or next value in a pop-up window field

LEVEL             In Data screen, inserts the leveling cursors.

ZOOM             In Data screen, enlarges a section of a trace.

In Motion screen, changes to a higher magnification video image.

Zq                    Displays Motion screen and then enables head movement and optional stage rotation.

XY                    Displays Motion screen and then enables XY stage movement.

START            In Motion screen begins scan. In Recipe screen, completes entry of a value or ID and then begins scan.

LOAD              Moves stage back and forth between the programmable load/unload position and the measurement position.

STOP              Aborts a scan.

[F1]-[F4]          Function keys. Usage defined at bottom of each screen or window.

TRACKBALL  An Alternative to the arrow keys: used to scroll through menu bar and menu selections.

In Motion screen, moves sample stage in the direction the trackball motion indicates.


Remote Keyboard

 

Figure 6.4-1         Remote PC/AT Enhanced Keyboard

 

Note: Placement of the keys is not same as on the built-in keyboard.

 

The Remote keyboard allows the use of other software applications on the instrument computer and as the same key names and functions Built-in Keyboard with the exception of the trackball.


System Start up

Enable p2.

Power should be on all the time!

 

(If power is off:
Press the Power Button:

Turn AC power by pressing the Red Power switch to the on position on Auxiliary Panel.

The Operating system will boot up automatically.

Press “Enter” Key after Logo appears on the screen.)

 

Switch monitor on.

Loading of Sample

Open the Measurement Area Door.

Stage should be in front, measurement head including stylus up.


(If not:
Press the LOAD button on the Built-in Keyboard or the F7/LOAD-UNLOAD button on the Remote Keyboard.)


Place the sample on the stage.

Switch vacuum on. (left side of Measurement Area Door)

Press the LOAD button (stage moves back).

Close the Measurement Area Door.


Lowering the Measurement Head Unit

Press the Zq button on the Built-in keyboard or press  F5/ Zq button of the Remote Keyboard.

Press the [ ¯ ] button on both keyboards for Low speed head motion.

Press the SEL + [ ¯ ] button on the Built-in Keyboard and Space bar +  [ ¯ ] button  on the Remote Keyboard for  High Speed Head motion.  

CAUTION: Do not lower the head onto the sample in high speed mode!

Lower Measurement Head unit till the stylus makes contact with surface of sample and release [ ¯ ] button.

Positioning the Sample Below the Stylus

Ensure that a sample is load on stage before lowering the Measurement Head Unit.

Press the XY button on the Built-in Keyboard or the F6/X-Y button on the Remote Keyboard.

This enables the XY movement and movements can be view on CRT monitor.

If XY coordinates are highlighted in green the stage movement is in the Precise XY movement mode.

If the XY coordinates are highlighted in red the stage movement is in the High speed XY movement mode.

To toggle between the movement modes press the F1 button on keyboards.

Press the   [ ¯ ]  [ ­ ]  [¬ ]  [® ] buttons or the trackball  to move stage into position.

 

How to rotate the sample:

Press the Zq button on the Built-in keyboard or press  F5/ Zq button of the Remote Keyboard.

Press the  [¬ ]  [® ] buttons.

 

Optical Zoom

Optical Zoom can be enable when sample has been loaded and measurement head is lowered and focus on sample.

Press the Zoom button on the Built-in Keyboard or the F11/ZOOM button on the Remote Keyboard.

Press the [ ¯ ] button to decrease magnification.

Press the [ ­ ] button to increase magnification.

Press the XY or Zq button for motion control.

Selecting a Scan Recipe

Press the MENU button on the Built-in Keyboard or the ESC/MENU button on the Remote Keyboard.

Select the Recipe Menu.

Select the Catalog. Press Enter.

Select the desired Recipe. Press Enter.

 Scanning a Sample

Load sample on stage.

Lower Measurement Head Unit.

Position the sample to desired location.

Position the cross hare next to desire measurement location.

Press the START button.

View scan in monitor

<!--[if !supportLists]-->a.      <!--[endif]-->if scan measurement is not correct press the STOP button.

<!--[if !supportLists]-->b.      <!--[endif]-->Re-position the sample.

<!--[if !supportLists]-->c.      <!--[endif]-->Press the START button.

 

 Electronic Data Leveling

Press the Level button on the Built-in Keyboard or Press F10/ LEVEL button on the Remote Keyboard.

Press SEL to toggle between the right and left cursors, the active curser is red.
Press SEL twice in quick succession to activate both cursors.

Position cursors using the [¬ ]  [® ] button or trackball.

Ensure that both cursors are on the same sample height.

Press F2: Re-plot or LEVEL Button

If data is still not level press UNDO button and start over.

 

To go back to the viewing screen, press Zq or XY button.

 

Unloading of Sample

Press LOAD, stylus moves up and stage moves forward.

Open the Measurement Area Door.

Switch vacuum off (left side of Measurement Area Door).

Remove sample from stage.

Close the Measurement Area Door

 

Shutdown:

 

Press Menu.

 Leave power on!

  1. Switch monitor off.
  2. Disable p2.
  3. RECORD RESULTS in the logbook.
  4. Clean up the area and return items to their proper locations.
  5. Record any problems.

 

Tool Shutdown, Maintenance only:

Select Exit.
Choose Shutdown from pull-down window. Press Enter.

When prompted to confirm power down, press Enter/Yes button on the Built-in keyboard.

Press the Power button on the Auxiliary Panel.

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