Thermal TiO2 from Water
This data was collected on the Savannah.
TiO2 Deposition rate of .38A/cycle for standard recipe
(Thanks to Jason Lin for his help with data collection.)
The deposition rate at 200C has a strong linear fit for .38A/cycle.
The monthly quality monitoring of TiO2 in the Savannah.
Temperature dependence of deposition rate for TiO2.
XPS evaluation of the composition of titania films indicates a Ti:O ration of approximately 1:3.
AFM analysis of sample with 200 cycles of titania deposited at 200C. The roughness of the film is on the order of twice that of a polished Si wafer.