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Thermal ZrO2

Data collected for thermal ZrO2 at SNF

Data collected from Savannah:

ZrO2 Deposition rate of .89A/cycle for standard recipe

(Thanks to Ze Yuan for his help with data collection.)

zro2 deposition rate

Deposition rate for ZrO2 films.

zro2 deposition rate

Process monitoring for Zirconia films.

zro2 deposition temperature dependence

Temperature dependence of the deposition rate of zirconia.


Data collected from Fiji2:

Thermal ZrOxide data (7/12/12)

Thermal ZrOx Data
Thanks to Elizabeth Friend from Rambus for the data!

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