Data collected from Savannah:
ZrO2 Deposition rate of .89A/cycle for standard recipe
(Thanks to Ze Yuan for his help with data collection.)
Deposition rate for ZrO2 films.
Process monitoring for Zirconia films.
Temperature dependence of the deposition rate of zirconia.
Data collected from Fiji2:
Thermal ZrOxide data (7/12/12)
Thanks to Elizabeth Friend from Rambus for the data!