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Black Magic Pro 4” Graphene Furnace Development and Characterization

Various emerging applications (flexible and transparent electronics, chemical sensors, thermal devices, etc.) utilizing graphene are being studied by Stanford researchers spanning multiple departments. With the recent installation of the Aixtron Black Magic Pro (BM Pro) 4” furnace, SNF users now have local access to a source of high quality graphene. In this project, we vary specific growth parameters in an attempt to improve graphene quality as well as establish reproducibility. We present Raman spectroscopy and electrical data which show that even after >100 growths, the BM Pro yields consistently high quality, monolayer graphene.

PDF document icon NCWang_CMNeumann_EE412_Final_Paper_GrapheneDev_Finalv4.pdf — PDF document, 2144 kB (2195536 bytes)

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